Bukatun kayan LTCC
Abubuwan buƙatun don kaddarorin kayan na’urorin LTCC sun haɗa da kayan lantarki, kaddarorin thermomechanical da kaddarorin sarrafawa.

Daidaitaccen wutar lantarki shine mafi mahimmancin dukiyar kayan LTCC. Tun da ainihin naúrar mitar rediyo-tsayin resonator ya yi daidai da madaidaicin tushen madaidaicin kayan aikin, lokacin ƙarancin aikin na’urar yayi ƙasa (kamar ɗaruruwan MHz), idan abu tare da ƙarancin ƙarancin wutar lantarki ana amfani da shi, na’urar Girman zai yi yawa don amfani. Sabili da haka, ya fi dacewa don daidaita daidaiton wutar lantarki don dacewa da mitoci daban -daban.

Hakanan asarar Dielectric shima muhimmin sigogi ne da aka yi la’akari da shi a cikin ƙirar na’urorin mitar rediyo, kuma yana da alaƙa kai tsaye da asarar na’urar. A ka’idar, ƙaramin ya fi kyau. Ma’anar zafin jiki na ma’aunin zafin wutar lantarki shine mahimmin sigogi wanda ke ƙayyade daidaiton zafin aikin lantarki na na’urar mitar rediyo.

Domin tabbatar da amincin na’urorin LTCC, dole ne a yi la’akari da yawancin kayan aikin thermo-inji yayin zaɓar kayan. Abu mafi mahimmanci shine daidaiton faɗaɗawar zafi, wanda ya dace da allon kewaye don a siyar dashi gwargwadon iko. Bugu da kari, la’akari da aiki da aikace -aikace na gaba, kayan LTCC suma zasu cika buƙatun aikin injiniya da yawa, kamar lanƙwasa ƙarfi σ, taurin Hv, shimfidar shimfiɗar ƙasa, madaidaiciyar madaidaicin E da karayar rauni KIC da sauransu.

Ayyukan aiwatarwa gabaɗaya na iya haɗawa da fannoni masu zuwa: Na farko, ana iya narkar da shi a zazzabi da ke ƙasa da 900 ° C a cikin wani ƙaramin abu mai ƙyalli. Na biyu, yawan zafin zafin bai kamata yayi ƙasa da ƙasa ba, don kada ya hana fitar da kwayoyin halitta a cikin manna azurfa da koren bel. Na uku, bayan ƙara kayan aikin da suka dace, ana iya jefa shi cikin madaidaici, santsi, da tef ɗin kore mai ƙarfi.

Rarraba kayan LTCC
A halin yanzu, kayan yumbu na LTCC galibi sun ƙunshi tsarin biyu, wato tsarin “gilashi-yumɓu” da tsarin “gilashi + yumɓu”. Doping tare da ƙarancin narkar da oxide ko ƙaramin gilashi mai narkewa na iya rage zafin zazzabin sinadarai, amma raguwar zafin zafin yana da iyaka, kuma aikin kayan zai lalace zuwa digiri daban-daban. Binciken kayan yumbu tare da ƙarancin zafin jiki ya jawo hankalin masu bincike. Babban nau’ikan irin waɗannan kayan da ake haɓakawa sune jerin barum tin borate (BaSn (BO3) 2), jerin germanate da tellurate, jerin BiNbO4, jerin Bi203-Zn0-Nb205, jerin ZnO-TiO2 da sauran kayan yumbu. A cikin ‘yan shekarun nan, kungiyar bincike ta Zhou Ji a jami’ar Tsinghua ta himmatu wajen yin bincike a wannan fanni.
Abubuwan mallakar LTCC
Ayyukan samfuran LTCC ya dogara gaba ɗaya kan aikin kayan da ake amfani da su. Kayan yumbu na LTCC galibi sun haɗa da kayan substrate na LTCC, kayan marufi da kayan aikin microwave. Dielectric m shine mafi mahimmancin kayan kayan LTCC. Ana buƙatar madaidaicin zafin wutar lantarki don yin jerin gwano a cikin kewayon 2 zuwa 20000 don dacewa da mitoci daban -daban. Misali, substrate tare da izinin dangi na 3.8 ya dace da ƙirar madaidaitan hanyoyin dijital; substrate tare da izinin dangi na 6 zuwa 80 na iya kammala ƙirar madaidaiciyar madaidaiciya; substrate tare da izinin dangi har zuwa 20,000 na iya yin Babban na’urori masu ƙarfin aiki an haɗa su cikin tsarin multilayer. Babban mita shine yanayin bayyane a cikin haɓaka samfuran 3C na dijital. Haɓaka ƙarancin ƙarancin wutar lantarki (ε≤10) kayan LTCC don biyan buƙatun babban mita da saurin gudu shine ƙalubale ga yadda kayan LTCC zasu iya dacewa da aikace -aikacen mitar. Tsarin dielectric na tsarin 901 na FerroA6 da DuPont shine 5.2 zuwa 5.9, 4110-70C na ESL shine 4.3 zuwa 4.7, madaidaicin madaidaicin madaidaicin LECCC na NEC shine kusan 3.9, kuma madaidaicin madaidaicin kamar 2.5 yana ƙarƙashin ci gaba.

Girman resonator yana daidai gwargwado ga tushen murabba’in dindindin, don haka idan aka yi amfani da shi azaman kayan dielectric, ana buƙatar dindindin ɗin ya zama babba don rage girman na’urar. A halin yanzu, iyakancin ƙarancin asara ko ƙima mai ƙima, ƙimar dangi (> 100) ko ma> 150 kayan lantarki sune wuraren bincike. Don da’irar da ke buƙatar ƙarfin girma, ana iya amfani da kayan da ke da madaidaiciyar wutar lantarki, ko kuma za a iya yin amfani da abin da ke da ƙima mai ƙarfi tare da madaidaicin ƙarfin wutar lantarki tsakanin LTCC dielectric ceramic substrate material Layer, kuma madaidaicin na iya zama tsakanin 20 da 100. Zaɓi tsakanin . Hakanan asarar Dielectric shima muhimmin sigogi ne don la’akari a cikin ƙirar na’urorin mitar rediyo. Yana da alaƙa kai tsaye da asarar na’urar. A ka’idar, ana fatan ƙaramin ya fi kyau. A halin yanzu, kayan LTCC da ake amfani da su a cikin na’urorin mitar rediyo galibi DuPont (951,943), Ferro (A6M, A6S), Heraeus (CT700, CT800 da CT2000) da dakunan gwaje-gwaje na Electro-science. Ba za su iya samar da tef ɗin yumbu na LTCC ba tare da madaidaiciyar madaidaiciya ba, amma kuma suna ba da kayan aikin da suka dace.

Wani batun zafi a cikin binciken kayan LTCC shine daidaiton kayan aiki tare. Lokacin da ake harba harsashi daban-daban (masu haɓakawa, tsayayya, haɓakawa, masu jagoranci, da dai sauransu), yakamata a sarrafa sarrafawar da keɓaɓɓiyar keɓaɓɓiyar tsakanin don musanya daidaiton kowane ɗayan Layer na lantarki mai kyau, da ƙima da ƙima. raguwa tsakanin yadudduka masu ƙima Ƙimar da ƙimar faɗaɗawar zafi suna daidai gwargwado don rage faruwar lahani kamar ɓarna, warping da fasawa.

Gabaɗaya magana, raguwar kayan yumbu ta amfani da fasahar LTCC kusan kashi 15-20%. Idan sintering na biyu ba za a iya daidaita ko jituwa ba, ƙirar keɓaɓɓiyar za ta raba bayan nutsewa; idan kayan biyu suna amsawa a cikin babban zazzabi, sakamakon amsawar zai haifar da halaye na asali na kayan daban. Haɗin aiki tare na abubuwa biyu tare da madaidaitan ma’aunin zafin wuta da abubuwan ƙira da yadda za a rage haɗin gwiwar juna shine mayar da hankali kan bincike. Lokacin da ake amfani da LTCC a cikin tsarin aiki mai ƙarfi, mabuɗin don tsananin kula da halayen ƙuntatawa shine don sarrafa raguwar ɓarna na tsarin haɗin gwiwa na LTCC. Rushewar tsarin haɗin gwiwa na LTCC tare da jagorar XY gaba ɗaya 12% zuwa 16%. Tare da taimakon ƙwanƙwasa matsin lamba ko fasahar taɓarɓarewar matsa lamba, kayan da ke da ƙanƙantar da kai a cikin jagorar XY ana samun su [17,18]. Lokacin nutsewa, ana sanya saman da kasan LTCC co-kora Layer a saman da kasa na LTCC co-kora Layer a matsayin raguwar kulawar raguwa. Tare da taimakon wani sakamako na haɗin gwiwa tsakanin madaidaicin sarrafawa da multilayer da tsayayyen ƙimar layin sarrafawa, ƙuntatawa halayen tsarin LTCC tare da hanyoyin X da Y an ƙuntata. Don ramawa ga raunin raunin substrate a cikin jagorar XY, za a biya diyya don raguwa a cikin hanyar Z. A sakamakon haka, girman canjin tsarin LTCC a cikin hanyoyin X da Y kusan kashi 0.1%ne, don haka tabbatar da matsayi da daidaiton wayoyi da ramuka bayan nutsewa, da tabbatar da ingancin na’urar.