LTCC cov khoom xav tau
Cov tseev kom muaj rau cov khoom siv ntawm LTCC cov cuab yeej suav nrog cov khoom siv hluav taws xob, cov khoom siv thermomechanical thiab cov txheej txheem txheej txheem.

Dielectric qhov tsis tu ncua yog qhov khoom tseem ceeb tshaj plaws ntawm LTCC cov ntaub ntawv. Txij li chav tsev yooj yim ntawm cov cuab yeej siv xov tooj cua-qhov ntev ntawm tus resonator yog qhov sib npaug sib npaug rau cov hauv paus plaub fab ntawm dielectric qhov tsis tu ncua ntawm cov khoom, thaum ua haujlwm zaus ntawm lub cuab yeej qis (xws li ntau pua MHz), yog tias cov khoom siv nrog qhov qis dielectric tas li tau siv, cov cuab yeej Loj yuav loj dhau los siv. Yog li ntawd, nws yog qhov zoo tshaj rau kev ua haujlwm dielectric tas li kom haum rau kev ua haujlwm sib txawv.

Dielectric poob kuj tseem yog qhov ntsuas tseem ceeb uas tau txiav txim siab hauv kev tsim cov xov tooj cua zaus, thiab nws cuam tshuam ncaj qha rau kev poob ntawm lub cuab yeej. Hauv kev xav, qhov me me zoo dua. Qhov kub coefficient ntawm dielectric qhov tsis tu ncua yog qhov ntsuas tseem ceeb uas txiav txim siab qhov kub thiab txias ntawm kev ua haujlwm hluav taws xob ntawm lub xov tooj cua zaus.

Txhawm rau kom ntseeg tau tias kev ntseeg tau ntawm LTCC cov cuab yeej, ntau yam khoom siv cua sov yuav tsum tau txiav txim siab thaum xaiv cov khoom. Qhov tseem ceeb tshaj plaws yog qhov coefficient ntawm kev nthuav dav cua sov, uas yuav tsum ua kom sib haum ntawm lub rooj tsav xwm hauv Circuit kom muab muag ntau li ntau tau. Ib qho ntxiv, txiav txim siab ua thiab daim ntawv thov yav tom ntej, LTCC cov ntaub ntawv yuav tsum ua tau raws li ntau yam kev ua tau zoo hauv kev ua haujlwm, xws li khoov lub zog σ, hardness Hv, npliag nplaim, elastic modulus E thiab tawg toughness KIC thiab ntxiv rau.

“Cov txheej txheem kev ua haujlwm tuaj yeem suav nrog cov hauv qab no: Ua ntej, nws tuaj yeem sintered ntawm qhov kub qis dua 900 ° C mus rau hauv qhov ntom ntom ntom, tsis muaj ntxeem tau microstructure. Qhov thib ob, qhov ntsuas kub yuav tsum tsis txhob qis dhau, yog li tsis tiv thaiv kev tso tawm ntawm cov organic teeb meem hauv cov nyiaj muab tshuaj txhuam thiab txoj siv ntsuab. Thib peb, tom qab ntxiv cov khoom siv organic tsim nyog, nws tuaj yeem muab pov rau hauv cov khaub ncaws zoo, du, thiab muaj zog ntsuab kab xev.

Kev faib tawm ntawm LTCC cov ntaub ntawv
Tam sim no, LTCC cov khoom siv ceramic feem ntau yog tsim los ntawm ob lub tshuab, uas yog “iav-ceramic” system thiab “iav + ceramic” system. Doping nrog cov tshuaj yaj yeeb yaj kiab tsawg los yog cov dej yaj yaj yaj tuaj yeem txo qhov kub ua kom sov ntawm cov khoom siv ceramic, tab sis kev txo qis ntawm kev ua kom txias txias muaj qhov txwv, thiab qhov ua tau zoo ntawm cov khoom yuav raug puas ntsoog sib txawv. Kev tshawb nrhiav cov khoom siv ceramic nrog qhov kub tsis txias tau nyiam cov neeg tshawb fawb. Cov ntsiab lus tseem ceeb ntawm cov ntaub ntawv no tau tsim los yog barium tin borate (BaSn (BO3) 2) series, germanate thiab tellurate series, BiNbO4 series, Bi203-Zn0-Nb205 series, ZnO-TiO2 series thiab lwm yam khoom siv ceramic. Xyoo tsis ntev los no, Zhou Ji pab pawg tshawb fawb ntawm Tsinghua University tau mob siab rau tshawb fawb hauv cheeb tsam no.
Cov khoom siv LTCC
Kev ua tau zoo ntawm LTCC cov khoom nyob ntawm qhov ua tau zoo ntawm cov khoom siv. LTCC cov khoom siv ceramic feem ntau suav nrog LTCC cov khoom siv hauv qab, cov ntim khoom thiab cov khoom siv microwave. Dielectric qhov tsis tu ncua yog qhov tseem ceeb tshaj plaws ntawm LTCC cov ntaub ntawv. Lub dielectric qhov tseem ceeb yuav tsum tau ua nyob hauv thaj tsam ntawm 2 txog 20000 kom tsim nyog rau kev ua haujlwm sib txawv. Piv txwv li, ib txheej nrog cov txheeb ze tso cai ntawm 3.8 yog qhov tsim nyog rau kev tsim cov tshuab hluav taws xob nrawm nrawm; ib txheej nrog cov txheeb ze tso cai ntawm 6 txog 80 tuaj yeem ua tiav cov qauv tsim hluav taws xob ntau zaus; ib txheej nrog cov txheeb ze tso cai txog li 20,000 tuaj yeem ua rau Cov cuab yeej muaj peev xwm tau muab tso ua ke rau hauv ntau yam qauv. Zaus siab yog qhov sib piv pom tseeb hauv kev txhim kho cov khoom lag luam digital 3C. Kev txhim kho qis dielectric tsis tu ncua (ε≤10) LTCC cov ntaub ntawv kom tau raws li qhov xav tau ntawm qhov ntau zaus thiab nrawm yog qhov nyuaj rau li cas LTCC cov ntaub ntawv tuaj yeem hloov kho rau cov ntawv thov siab. Lub dielectric tsis tu ncua ntawm 901 system ntawm FerroA6 thiab DuPont yog 5.2 txog 5.9, 4110-70C ntawm ESL yog 4.3 txog 4.7, dielectric tsis tu ncua ntawm NEC’s LTCC substrate yog li 3.9, thiab dielectric tas li qis li 2.5 tab tom tsim.

Qhov loj ntawm lub resonator yog qhov sib npaug sib npaug rau cov hauv paus plaub fab ntawm dielectric qhov tsis tu ncua, yog li thaum siv los ua cov khoom siv dielectric, dielectric qhov tas li yuav tsum tau loj los txo cov cuab yeej loj. Tam sim no, qhov txwv tsis pub poob qis lossis ultra-siab Q tus nqi, txheeb ze tso cai (> 100) lossis txawm tias> 150 dielectric cov ntaub ntawv yog tshawb fawb hotspots. Rau cov kab hluav taws xob xav tau kev muaj peev xwm loj dua, cov khoom siv uas muaj lub siab dielectric tsis tu ncua tuaj yeem siv tau, lossis cov khoom siv hluav taws xob txheej nrog lub dielectric loj dua tuaj yeem raug sib dhos ntawm LTCC dielectric ceramic substrate cov khoom txheej, thiab dielectric tas li tuaj yeem nyob nruab nrab ntawm 20 thiab 100. Xaiv ntawm . Dielectric poob kuj tseem yog qhov ntsuas tseem ceeb los xav txog hauv kev tsim cov cuab yeej siv xov tooj cua. Nws yog cuam tshuam ncaj qha rau kev poob ntawm lub cuab yeej. Hauv kev xav, nws vam tias qhov me me zoo dua. Tam sim no, LTCC cov ntaub ntawv siv hauv cov khoom siv xov tooj cua feem ntau yog DuPont (951,943), Ferro (A6M, A6S), Heraeus (CT700, CT800 thiab CT2000) thiab Electro-science Laboratories. Lawv tuaj yeem tsis tsuas yog muab cov ntawv LTCC ntsuab kab xev nplaum nrog dielectric tas li, tab sis tseem muab cov khoom sib txuas sib txuas.

Lwm qhov teeb meem kub hauv kev tshawb fawb ntawm LTCC cov ntaub ntawv yog qhov sib xws ntawm cov khoom siv sib foob. Thaum sib koom ua haujlwm sib txawv dielectric txheej (capacitors, resistances, inductances, conductors, thiab lwm yam), cov tshuaj tiv thaiv thiab kev sib kis sib kis ntawm cov cuam tshuam sib txawv yuav tsum raug tswj kom ua kom sib sib zog nqus sib phim ntawm txhua txheej dielectric zoo, thiab qhov ntom ntom ntom ntom thiab ua kom sib xyaw shrinkage ntawm cov txheej txheej interface Tus nqi thiab cov cua sov nthuav dav yog zoo ib yam li ua tau kom txo qhov tshwm sim ntawm qhov tsis xws xws li spalling, warping thiab cracking.

Feem ntau hais lus, qhov txo qis ntawm cov khoom siv ceramic siv LTCC thev naus laus zis yog li 15-20%. Yog tias kev sib tua ntawm ob qho tsis tuaj yeem sib phim lossis sib xws, txheej txheej txheej yuav sib cais tom qab sib xyaw; yog tias ob yam ntaub ntawv cuam tshuam ntawm qhov kub siab, txheej txheej txheej txheej yuav cuam tshuam rau cov yam ntxwv qub ntawm cov khoom siv. Kev sib koom ua ke sib koom ua ke ntawm ob cov ntaub ntawv nrog qhov sib txawv dielectric qhov sib txawv thiab kev sib xyaw thiab yuav ua li cas thiaj li txo qis kev sib cuam tshuam yog qhov tseem ceeb ntawm kev tshawb fawb. Thaum LTCC tau siv rau hauv cov txheej txheem ua haujlwm tau zoo, tus yuam sij rau kev tswj nruj ntawm kev coj ua kom nruj yog txhawm rau tswj kev ua kom sib sib zog nqus ntawm LTCC kev sib zog ua haujlwm. Kev txo qis ntawm LTCC kev sib koom ua haujlwm raws XY cov lus qhia feem ntau yog 12% txog 16%. Nrog kev pab los ntawm kev ua kom tsis txhob siab lossis siv lub tshuab ua kom tsis muaj zog, cov khoom siv nrog xoom shrinkage hauv XY cov lus qhia tau txais [17,18]. Thaum sintering, sab saum toj thiab hauv qab ntawm LTCC cov txheej txheem raug rho tawm haujlwm raug muab tso rau saum thiab hauv qab ntawm LTCC cov txheej txheem sib foob raws li txheej txheej kev sib zog. Nrog kev pab los ntawm qee yam kev sib raug zoo ntawm cov txheej txheem tswj hwm thiab ntau txheej thiab qhov nruj nruj ntawm tus txheej txheem tswj, qhov kev coj ua ntawm LTCC tus qauv raws X thiab Y cov lus qhia raug txwv. Txhawm rau txhawm rau txhawm rau txhawm rau qhov poob qis ntawm cov substrate hauv XY cov lus qhia, cov substrate yuav tau them rau kev nqaim hauv Z qhia. Raws li qhov tshwm sim, qhov hloov pauv ntawm LTCC cov qauv hauv X thiab Y cov lus qhia tsuas yog kwv yees li 0.1%, yog li ua kom ntseeg tau tias txoj haujlwm thiab qhov tseeb ntawm cov thaiv thiab qhov tom qab kev sib tsoo, thiab ua kom ntseeg tau tias lub cuab yeej zoo.