Nā koina mea LTCC
ʻO nā koi no nā pono waiwai o nā lako LTCC me nā pono uila, nā pono thermomekanical a me nā hana kaʻina.

ʻO ka dielectric paʻa mau ka waiwai ʻoi loa o nā mea LTCC. Ma muli o ka mahele maʻamau o ka pono pinepine pinepine o ka lekiō-ʻo ka lōʻihi o ka resonator ka mea kūlike i ka mole square o ka dielectric mau o nā mea, ke haʻahaʻa ka alapine hana o ka hāmeʻa (e like me nā haneli MHz), inā he mea me kahi haʻahaʻa dielectric haʻahaʻa e hoʻohana ʻia ai, ka hāmeʻa E nui ana ka nui e hoʻohana. No laila, ʻoi aku ka maikaʻi o ka serialize i ka dielectric mau e kū i nā alapine hana like ʻole.

ʻO ka nalowale uila kekahi mea nui i manaʻo ʻia i ka hoʻolālā ʻana i nā hāmeʻa uila pinepine, a pili pono ia i ka nalo ʻana o ka hāmeʻa. I ke kumumanaʻo, ʻo ka liʻiliʻi ka ʻoi. ʻO ke koina o ka mahana o ka dielectric mau he palena nui e hoʻoholo ai i ka paʻa o ka mahana o ka hana uila o ka uila pinepine pinepine.

I mea e hōʻoia ai i ka hilinaʻi o nā hāmeʻa LTCC, pono e noʻonoʻo pū ʻia nā pono thermo-mechanical i ke koho ʻana i nā mea. ʻO ka mea koʻikoʻi nui ka coefficient o ka hoʻonui ʻana o ka mehana, kahi e kūlike ai i ka papa kaapuni e hoʻoheheʻe ʻia e like me ka hiki. Hoʻohui ʻia, e noʻonoʻo ana i ka hana ʻana a me nā noi no ka wā e hiki mai ana, pono i nā mea LTCC e hoʻokō i nā koina hana mechanical, e like me ka paʻa ʻana i ka σ, paʻakikī Hv, pālahalaha o ka papa, elima modulus E a me ka paʻakikī paʻakikī KIC a pēlā aku.

“ʻO ke kaʻina hana hiki ke hoʻopili i nā ʻano aʻe: ʻO ka mea mua, hiki ke hoʻopili ʻia i kahi mahana ma lalo o 900 ° C i loko o kahi microstructure non-porous. ʻO ka lua, ʻaʻole e haʻahaʻa loa ka mahana o ka densification, i mea e pale ʻole ai i ka hoʻokuʻu ʻia ʻana o nā meaola i loko o ka paʻi kālā a me ke kāʻei ʻōmaʻomaʻo. ʻO ke kolu, ma hope o ka hoʻohui ʻana i nā pono meaola kūpono, hiki ke hoʻolei ʻia i loko o kahi kāʻei, paheʻe, a me ka lipine ʻōmaʻomaʻo ikaika.

Hoʻokaʻina o nā mea LTCC
I kēia manawa, haku ʻia nā mea pālolo LTCC i ʻelua mau ʻōnaehana, ʻo ia ka ʻōnaehana “aniani-pālolo” a me ka ʻōnaehana “aniani + pālolo”. ʻO ke kope ʻana me ka oxide hoʻoheheʻe haʻahaʻa a me ke aniani hoʻoheheʻe haʻahaʻa hiki ke hōʻemi i ka mahana sinter o nā mea pālolo, akā ka palena o ka hoʻohaʻahaʻa ʻana o ka mahana, a e hōʻino ʻia ka hana o nā mea i nā kekelē ʻokoʻa. ʻO ka ʻimi ʻana i nā mea pālolo me ka mahana wela liʻiliʻi i ʻume ʻia ka manaʻo o nā kānaka noiʻi. ʻO nā ʻano nui o ia ʻano mea e hoʻomohala ʻia ana ʻo barium tin borate (BaSn (BO3) 2) series, germanate a me Tellurate series, BiNbO4 series, Bi203-Zn0-Nb205 series, ZnO-TiO2 series a me nā ceramic material. I nā makahiki i hala iho nei, ua hoʻopaʻa ʻia ka pūʻulu noiʻi o Zhou Ji ma ke Kulanui ʻo Tsinghua e noiʻi ma kēia wahi.
Nā waiwai waiwai LTCC
Pili ka hana a nā huahana LTCC i ka hana o nā pono i hoʻohana ʻia. Pākuʻi ʻia nā mea pālima LTCC i nā mea substrate LTCC, nā mea ukana a me nā pono uila pono. ʻO ka dielectric paʻa mau ka waiwai ʻoi loa o nā mea LTCC. Koi ʻia ka hoʻomau dielectric e serialized i ka pae o 2 a 20000 e kūpono ai i nā alapine hana like ʻole. ʻO kahi laʻana, kūpono kahi substrate me kahi permittivity pili o 3.8 no ka hoʻolālā ʻana i nā kaiapili uila wikiwiki; kahi substrate me kahi permittivity pili o 6 a 80 hiki ke hoʻopau pono i ka hoʻolālā ʻana o nā kaho uila pinepine; kahi substrate me kahi ʻae a hiki i 20,000 hiki ke hana i nā hāmeʻa kiʻekiʻe i loko o kahi hanana multilayer. ʻO ke alapine kiʻekiʻe kahi hiʻohiʻona maopopo loa i ka hoʻomohala ʻana i nā huahana 3C uila. ʻO ka hoʻomohala ʻana i nā mea LTCC dielectric haʻahaʻa (ε≤10) e hoʻokō i nā koina o ke alapine kiʻekiʻe a me ka wikiwiki nui kahi pilikia no ka pehea e hiki ai i nā mea LTCC ke hoʻololi i nā noi pinepine pinepine. ʻO ka hoʻomau dielectric o ka ʻōnaehana 901 o FerroA6 a me DuPont ʻo 5.2 a 5.9, ʻo ka 4110-70C o ESL ʻo 4.3 a 4.7, ka hoʻomau dielectric o ka substrate LTCC o NEC ma kahi o 3.9, a me ka hoʻomau dielectric ma lalo o 2.5 i lalo o ka hoʻomohala.

Hoʻohālikelike kūlike ka nui o ka resonator i ke aʻa huinahā o ka paʻa mau dielectric, no laila ke hoʻohana ʻia ma ke ʻano he mea dielectric, pono ka nui o ka dielectric e nui e hōʻemi i ka nui o ka hāmeʻa. I kēia manawa, ka palena o ka pohō ultra-low a i ʻole ke kiʻekiʻe Q kiʻekiʻe Q, pili pono ʻana (> 100) a i ʻole> 150 mau mea dielectric he mau wahi noiʻi noiʻi. No nā kaapuni e koi ana i ka capacitance ʻoi aku ka nui, hiki ke hoʻohana ʻia nā mea me ka paʻa mau dielectric, a i ʻole kahi papa mea dielectric me kahi paʻa dielectric nui aʻe e hiki ke hana ʻia ma waena o ka LTCC dielectric ceramic substrate material layer, a me ka dielectric mau hiki ma waena o 20 a me 100. Koho ma waena o . ʻO ka nalowale uila kekahi mea nui e noʻonoʻo ai i ka hoʻolālā ʻana i nā hāmeʻa uila. Pili pono ia i ka nalo ʻana o ka hāmeʻa. I ke kumumanaʻo, manaʻolana ʻoi aku ka maikaʻi o ka liʻiliʻi. I kēia manawa, hoʻohana ʻia nā mea LTCC i hoʻohana ʻia i nā pono uila pinepine DuPont (951,943), Ferro (A6M, A6S), Heraeus (CT700, CT800 a me CT2000) a me nā Laboratories Electro-science. ʻAʻole hiki iā lākou ke hāʻawi wale i ka lipest ceramic LTCC serialized me ka dielectric mau, akā hāʻawi pū i nā mea pono uila.

ʻO kekahi pilikia nui i ka noiʻi ʻana o nā mea LTCC ka hoʻokaulike o nā mea i co-fired. Ke hui pū ʻana i nā papa dielectric ʻokoʻa (capacitors, resistances, inductances, conductors, a pēlā aku), e kāohi ʻia ka hopena a me ka diffusion interface ma waena o nā interface like e hana maikaʻi ai i ke kuhi ʻana o nā pale dielectric, a me ka nui o ka nui a me ka sinter hoʻoliʻiliʻi ma waena o nā papa kuʻina ʻO ke ana a me ka hoʻonui hoʻonui wela e like me ka hiki ke hōʻemi i ka hanana o nā kīnā e like me ka spalling, warping and cracking.

ʻO ka ʻōlelo maʻamau, ʻo ka nui o ka shrinkage o nā mea pālolo e hoʻohana ana i ka ʻenehana LTCC ma kahi o 15-20%. Inā ʻaʻole hiki i ke kuʻina o ka ʻelua ke hoʻohālikelike a kūlike paha, e hoʻokaʻawale ʻia ka papa waena ma hope o ka hana hewa ʻana. inā hana nā mea ʻelua i kahi mahana wela, e hoʻopili ka hopena hopena i nā ʻano kumu o nā pono. ʻO ke kaulike pū ʻana o nā mea ʻelua me nā dielectric mau like ʻole a me nā mele a pehea e hoʻemi ai i ka reactivity ʻelua ke kikowaena o ka noiʻi. Ke hoʻohana ʻia ʻo LTCC i nā ʻōnaehana hana kiʻekiʻe, ʻo ke kī i ka kaohi paʻa ʻana i ka hana shrinkage ka mālama ʻana i ka shrinkage sinter o ka ʻōnaehana co-fired LTCC. ʻO ka shrinkage o ka ʻōnaehana co-fired LTCC ma ke ʻaoʻao XY ʻo 12% a 16%. Me ke kōkua o ka ʻenehana sinter pressureless a i ʻole ke ʻomi ʻana i kōkua ʻia e ka ʻenehana, loaʻa nā mea me ka zero i ka ʻaoʻao XY [17,18]. Ke kuhi hewa ʻana, hoʻonoho ʻia ka luna a me lalo o ka ʻāpana co-fired LTCC ma luna a ma lalo o ka papa co-fired LTCC ma ke ʻano he papa hoʻokele shrinkage. Me ke kōkua o kekahi hopena hoʻopili ma waena o ka papa kaohi a me ka multilayer a me ka nui o ka hoʻoliʻiliʻi o ka papa hoʻomalu, ua kapu ka hana shrinkage o ka hanana LTCC ma nā ʻaoʻao X a me Y. I mea e uku ai i ka nalowale ʻana o ka mea i lalo ma ka ʻaoʻao XY, e uku ʻia ka mea i hoʻoiho ʻia no ka shrinkage ma ka ʻaoʻao Z. A ʻo kahi hopena, ʻo ka nui o ka loli o ka hanana LTCC ma nā ʻaoʻao X a me Y ma kahi o 0.1% wale nō, no laila e hōʻoia ana i ke kūlana a me ka pololei o nā uea a me nā puka ma hope o ke kuhi hewa ʻana, a me ka hōʻoia ʻana i ka maikaʻi o ka hāmeʻa.