Zofunikira zakuthupi za LTCC
Zofunikira pazinthu zakuthupi za zida za LTCC zimaphatikizira zamagetsi, ma thermomechanical katundu ndi mawonekedwe amachitidwe.

Nthawi zonse dielectric ndiye chinthu chofunikira kwambiri pazida za LTCC. Popeza chida choyambira pama radio frequency-kutalika kwa resonator kumakhala kofanana ndendende ndi mizu yayikulu ya ma dielectric nthawi zonse, pomwe magwiridwe antchito a chipangizocho ndi otsika (monga mazana a MHz), ngati chinthu ndi nthawi yotsika ya dielectric imagwiritsidwa ntchito, chipangizocho Kukula kudzakhala kwakukulu kwambiri kuti mugwiritse ntchito. Chifukwa chake, ndibwino kuti musinthe ma dielectric mosalekeza kuti mugwirizane ndimafashoni osiyanasiyana.

Kutaya kwa dielectric ndichinthu chofunikira kwambiri chomwe chimaganiziridwa pakupanga kwa zida zama wayilesi, ndipo chimakhudzana mwachindunji ndi kutayika kwa chipangizocho. Mwachidziwitso, zazing’ono zimakhala zabwino. Kutentha kozama kwa ma dielectric mosalekeza ndi gawo lofunikira lomwe limatsimikizira kukhazikika kwamphamvu kwamagetsi pamagetsi pafupipafupi.

Pofuna kutsimikizira kudalirika kwa zida za LTCC, zida zambiri zamagetsi zimayenera kuganiziridwanso posankha zida. Chovuta kwambiri ndi kuchuluka kwakukula kwamatenthedwe, komwe kuyenera kufanana ndi bolodi la dera kuti ligulitsidwe momwe zingathere. Kuphatikiza apo, poganizira kukonza ndi kugwiritsa ntchito mtsogolo, zida za LTCC ziyeneranso kukwaniritsa zofunikira zambiri pamakina, monga kupindika mphamvu σ, kuuma kwa Hv, kukhazikika pamwamba, zotanuka modulus E ndi kulimba kwa KIC ndi zina zotero.

“Ndondomeko ya magwiridwe antchito imatha kuphatikiza zinthu izi: Choyamba, imatha kusungunuka ndi kutentha kosakwana 900 ° C kukhala microstructure yolimba, yopanda phulusa. Chachiwiri, kutentha kwa densification sikuyenera kukhala kotsika kwambiri, kuti tipewe kutulutsa zakuthupi mumphika wa siliva ndi lamba wobiriwira. Chachitatu, mutawonjezera zinthu zoyenera, zimatha kuponyedwa mu tepi yunifolomu, yosalala komanso yolimba.

Gulu la zida za LTCC
Pakadali pano, zida za ceramic za LTCC zimapangidwa ndimakina awiri, omwe ndi “galasi-ceramic” dongosolo ndi “galasi + ceramic”. Kuyika ndi osungunuka otsika kapena galasi losungunuka kumatha kuchepetsa kutentha kwa zinthu za ceramic, koma kuchepa kwa kutentha kwa sintering kumakhala kochepa, ndipo magwiridwe antchito azidzawonongeka mosiyanasiyana. Kufufuza kwa zida za ceramic zotentha kwambiri sintering kwachititsa chidwi ofufuza. Mitundu yayikulu yazinthu zopangidwazo ndi barium tin borate (BaSn (BO3) 2), germanate and tellurate series, BiNbO4 series, Bi203-Zn0-Nb205 series, ZnO-TiO2 series and other ceramic materials. M’zaka zaposachedwa, gulu lofufuza la Zhou Ji ku University of Tsinghua ladzipereka kuti lifufuze m’derali.
LTCC zakuthupi
Magwiridwe azinthu za LTCC zimadalira kwathunthu momwe zinthu zimagwiritsidwira ntchito. Zipangizo zadothi za LTCC zimaphatikizapo zida za LTCC, zomangira ma CD ndi zida zama microwave. Nthawi zonse ma dielectric ndiye chinthu chofunikira kwambiri pazida za LTCC. Nthawi zonse ma dielectric amafunika kuti azisindikizidwa mu 2 mpaka 20000 kuti akhale oyenera magwiridwe antchito osiyanasiyana. Mwachitsanzo, gawo lapansi lokhala ndi chilolezo chovomerezeka cha 3.8 ndiloyenera kapangidwe ka ma circuits othamanga kwambiri; Gawo lapansi lokhala ndi chilolezo chokwanira 6 mpaka 80 limatha kumaliza mapangidwe azamagetsi pafupipafupi; gawo lapansi lokhala ndi chilolezo chokwanira mpaka 20,000 limatha kupanga zida zapamwamba kwambiri kuti ziphatikizidwe ndi mawonekedwe amitundu yambiri. Kuthamanga kwapamwamba ndizowonekera pakapangidwe kazinthu zamagetsi za 3C. Kukula kwa zida zamagetsi zochepa zamagetsi (ε≤10) LTCC kuti zikwaniritse zofunikira pafupipafupi komanso kuthamanga kwambiri ndizovuta pamomwe zida za LTCC zimatha kusintha kuti zizigwiritsa ntchito pafupipafupi. Mphamvu yamagetsi yamagetsi yamagetsi ya 901 ya FerroA6 ndi DuPont ndi 5.2 mpaka 5.9, 4110-70C ya ESL ndi 4.3 mpaka 4.7, kusintha kwa dielectric kosalekeza kwa gawo la NECC LTCC kuli pafupifupi 3.9, ndipo ma dielectric omwe amakhala otsika ngati 2.5 akupanga chitukuko.

Kukula kwa resonator kumafanana molingana ndi mizu yayikulu ya ma dielectric, chifukwa chake ikagwiritsidwa ntchito ngati chopangira ma dielectric, nthawi zonse ma dielectric amayenera kukhala akulu kuti achepetse kukula kwa chipangizocho. Pakadali pano, malire a kutayika kopitilira muyeso kapena kopitilira muyeso wa Q wapamwamba, kuloleza kovomerezeka (> 100) kapena ngakhale> zida zopangira ma dielectric 150 ndi malo omwe amafufuzira. Kwa ma circuits omwe amafunikira mphamvu yayikulu, zida zogwiritsira ntchito ma dielectric pafupipafupi zitha kugwiritsidwa ntchito, kapena ma dielectric material wosanjikiza wokhala ndi dielectric yayikulu nthawi zonse atha kusanjidwa pakati pa LTCC dielectric ceramic substrate material layer, ndipo ma dielectric pafupipafupi amatha kukhala pakati pa 20 ndi 100. Sankhani pakati . Kutaya kwa ma dielectric ndichinthu chofunikira kwambiri pakuganizira pakupanga zida zama wayilesi. Zimakhudzana mwachindunji ndi kutayika kwa chipangizocho. Mwachidziwitso, tikukhulupirira kuti zazing’ono zimakhala zabwino. Pakadali pano, zida za LTCC zomwe zimagwiritsidwa ntchito pazida zama wayilesi makamaka ndi DuPont (951,943), Ferro (A6M, A6S), Heraeus (CT700, CT800 ndi CT2000) ndi Electro-science Laboratories. Sangangopereka matepi a LTCC obiriwira okhala ndi ma dielectric mosalekeza, komanso amapereka zida zofananira.

Vuto lina lotentha pakufufuza kwa zida za LTCC ndizogwirizana ndi zida zopangira moto. Mukamawombera ma dielectric osiyanasiyana (ma capacitors, ma resistances, ma inductances, otsogolera, ndi zina zambiri), mayankho ndi mawonekedwe apakati pa polumikizira osiyanasiyana amayenera kuwongoleredwa kuti kuwombera kofananira kwa gawo lililonse la dielectric kukhala kwabwino, komanso kuchuluka kwake ndikukhala sintering Kupindika pakati pa mawonekedwe a mawonekedwe Mlingo ndi kuchuluka kwa matenthedwe kukulira kumakhala kosasinthasintha momwe zingathere kuti muchepetse zolakwika monga kupindika, kupindika ndi kulimbana.

Nthawi zambiri, kuchepa kwa zida za ceramic pogwiritsa ntchito ukadaulo wa LTCC ndi pafupifupi 15-20%. Ngati sintering ya awiriwa silingafanane kapena kuyanjana, mawonekedwe osanjikiza adzagawanika pambuyo pa sintering; ngati zinthu ziwirizi zitentha kwambiri, zomwe zimapangitsa kuti zisanjidwe zimakhudza mawonekedwe apachiyambi cha zinthuzo. Kuphatikizana kozungulira pazida ziwiri zokhala ndi ma dielectric osiyanasiyana ndi kapangidwe kake komanso momwe mungachepetsere kuyanjananso ndizo zomwe kafukufuku akuchita. LTCC ikagwiritsidwa ntchito pamakina ogwiritsa ntchito kwambiri, chinsinsi chothanirana mwamakhalidwe ndikuwongolera kuchepa kwa sintering kwa makina ophatikizira a LTCC. Kuchepa kwa makina oyatsa moto a LTCC motsatira njira ya XY nthawi zambiri amakhala 12% mpaka 16%. Mothandizidwa ndi sintering yopanikizika kapena ukadaulo wothandizidwa ndi sintering, zida zokhala ndi zero shrinkage mu XY malangizo zimapezeka [17,18]. Mukakhala sintering, pamwamba ndi pansi pa LTCC chophatikizira chophatikizika chimayikidwa pamwamba ndi pansi pa LTCC chophatikizira chophatikizira ngati chopendekera chowongolera. Mothandizidwa ndi kulumikizana kwakanthawi pakati pazoyang’anira ndi multilayer komanso kukhwima kwamphamvu kwazowongolera, mawonekedwe a shrinkage amachitidwe a LTCC pamayendedwe a X ndi Y amaletsedwa. Pofuna kubwezera kuchepa kwa gawo lapansi mu XY, gawolo lidzalipiridwa chifukwa cha kuchepa kwa njira ya Z. Zotsatira zake, kukula kwa kapangidwe ka LTCC mumayendedwe a X ndi Y kuli pafupifupi 0.1%, potero kuwonetsetsa malo ndi kulondola kwa zingwe ndi mabowo atatha sintering, ndikuwonetsetsa kuti chipangizocho ndichabwino.