LTCC zvinhu zvinodiwa
Izvo zvinodikanwa zvezvinhu zvemidziyo yeLTCC zvishandiso zvinosanganisira zvemagetsi zvivakwa, thermomechanical zvivakwa uye maitiro maitiro.

Iyo dielectric inogara iripo ndiyo inonyanya kukosha zvinhu zveLTCC zvigadzirwa. Sezvo chinhu chekutanga cheiyo redhiyo frequency kifaa – iyo kureba resonator iri inversely yakaenzana kune iyo mraba mudzi weiyo dielectric kugara kwechinhu, kana iko kushanda frequency kwechigadzirwa kuri pasi (semazana eMHz), kana chinhu ine yakaderera dielectric inogara ichishandiswa, chishandiso Saizi yacho ichave yakakura kwazvo kushandisa. Naizvozvo, zvakanakisa kuisa dielectric nguva dzese kuti zvienderane akasiyana mafiringi ekushandisa.

Dielectric kurasikirwa zvakare yakakosha paramende inofungidzirwa mukugadzirwa kweredhiyo frequency zvishandiso, uye inoenderana zvakananga nekurasikirwa kwechigadzirwa. Mukufungidzira, zvidiki zvirinani. Iyo tembiricha yekumanikidza kweiyo dielectric inogara iri yakakosha paramende iyo inosarudza iyo tembiricha kudzikama kwemagetsi mashandiro eiyo radio frequency kifaa.

Kuti uve nechokwadi chekuvimbika kweLTCC zvishandiso, akawanda thermo-mechanical zvivakwa zvinofanirwawo kutariswa pakusarudza zvinhu. Iyo inonyanya kukosha ndeyekuti coefficient yekupisa kwekuwedzera, iyo inofanirwa kuenderana nedunhu redunhu kuti itengeswe zvakanyanya sezvinobvira. Uye zvakare, tichifunga nezvekugadzirisa uye kunyorera maficha, zvigadzirwa zveLTCC zvinofanirwawo kusangana nezvakawanda zvekuita zvinodiwa, sekukotama kwesimba σ, kuomarara Hv, kumeso kugadzikana, elastic modulus E uye kutsemuka kuomarara KIC zvichingodaro.

“Maitiro ekuita anowanzo sanganisira anotevera maficha: Chekutanga, inogona kusintwa patembiricha iri pazasi pe 900 ° C mune dense, isina-porous microstructure. Chechipiri, iyo tembiricha yekuwandisa haifanire kunge yakanyanya kudzikira, kuitira kuti isadzivirire kuburitswa kwezvinhu zvakasikwa mumarara esirivheri uye bhandi regirini. Yetatu, mushure mekuwedzera yakakodzera organic zvigadzirwa, inogona kukandwa muyunifomu, yakatsetseka, uye yakasimba green green tepi.

Kupatsanura kweLTCC zvinhu
Parizvino, LTCC zvedongo zvigadzirwa zvinonyanya kuve zvine maviri masisitimu, ayo ari “girazi-zvedongo” system uye iyo “girazi + zvedongo” system. Kudhiraivha ine yakadzika-yakanyungudika oxide kana yakaderera-inonyungudika girazi kunogona kudzora iyo sintering tembiricha yezvinhu zvedongo, asi kudzikiswa kwekusvetesa tembiricha ishoma, uye mashandiro echinhu acho achakanganisika kune akasiyana madhigirii. Kutsvaga kwezvinhu zve ceramic zvine tembiricha yakadzika sintering kwakwezva kutariswa kwevaongorori. Mhando dzakasiyana dzemidziyo yakadaro iri kugadzirwa ndeye barium tin borate (BaSn (BO3) 2) dzakateedzana, germanate uye tellurate nhevedzano, BiNbO4 nhevedzano, Bi203-Zn0-Nb205 dzakateedzana, ZnO-TiO2 dzakateedzana uye zvimwe zvinhu zveceramic. Mumakore achangopfuura, boka rekutsvagisa raZhou Ji kuTsinghua University rakazvipira kutsvagisa munzvimbo ino.
LTCC zvinhu zvemidziyo
Iko mashandiro ezvigadzirwa zveLTCC zvinoenderana zvachose nekuita kwezvinhu zvinoshandiswa. LTCC zvedongo zvigadzirwa zvinonyanya kusanganisira LTCC substrate zvinhu, zvekutakura zvinhu uye microwave mudziyo zvinhu. Dielectric inogara iripo ndiyo inonyanya kukosha zvinhu zveLTCC zvigadzirwa. Iyo dielectric inogara ichidikanwa kuti iiswe serialized mune huwandu hwe2 kusvika 20000 kuti ive yakakodzera kune akasiyana mashandiro ekushambadzira. Semuenzaniso, substrate ine hama inobvumidzwa ye3.8 inokodzera dhizaini-inomhanya maseketi edhijitari; substrate ine hama inobvumidzwa ye6 kusvika ku80 inogona kupedzisa dhizaini yematanho epamusoro-frequency; substrate ine hama inobvumidzwa inosvika zviuru makumi maviri inokwanisa kuita Midziyo-inokwana michina inosanganisirwa muchimiro chemultilayer. Yakakwira frequency ndiyo yakasarudzika maitiro mukuvandudza kweadhijitari 20,000C zvigadzirwa. Iko kuvandudzwa kweyepasi dielectric inogara (ε≤3) LTCC zvinhu zvekusangana nezvinodiwa zveyakanyanya frequency uye kumhanya kwakanyanya kunonetsa kwekuti LTCC zvinhu zvinokwanisa kuchinjika kune yakakwira frequency mafomu. Iyo dielectric inogara yeiyo 10 system yeFerroA901 neDuPont iri 6 kusvika 5.2, iyo 5.9-4110C yeESL iri 70 kusvika 4.3, iyo dielectric inogara iripo yeNEC’s LTCC substrate ingangoita 4.7, uye dielectric inogara yakadzika kunge 3.9 iri pasi pekuvandudzwa.

Saizi yesonator inowirirana zvakaenzana nekwere midzi yeiyo dielectric inogara iripo, saka painoshandiswa sechinhu che dielectric, iyo dielectric inogara ichidikanwa kuti ive hombe kudzikisa saizi yechigadzirwa. Parizvino, iyo muganho weakanyanya-kuderera kurasikirwa kana Ultra-yakakwira Q kukosha, kwakabatana kubvumidzwa (> 100) kana kunyangwe> 150 dielectric zvinhu zviri zvekutsvagisa nzvimbo. Kune macircuit anoda yakakura capacitance, zvishandiso zvine dielectric zvinogara zvichishandiswa zvinogona kushandiswa, kana dielectric zvinhu zvakapetwa zvine hombe dielectric inogara inogona kuiswa sandwiched pakati peLTCC dielectric ceramic substrate material layer, uye dielectric nguva dzose inogona kuva pakati pe20 ne100. Sarudza pakati . Kurasikirwa kwe dielectric zvakare kwakakosha paramende yekufunga mukugadzirwa kweredhiyo frequency zvishandiso. Iyo inowirirana zvakananga nekurasikirwa kwechigadzirwa. Mukufunga, zvinotarisirwa kuti zvidiki zviri nani. Parizvino, zvishandiso zveLTCC zvinoshandiswa muredhiyo frequency zvishandiso zviri kunyanya DuPont (951,943), Ferro (A6M, A6S), Heraeus (CT700, CT800 uye CT2000) uye Electro-science Laboratories. Havagone chete kupa serialized LTCC girini ceramic tepi ine dielectric nguva dzose, asi zvakare inopa inoenderana wiring zvinhu.

Imwe nyaya inopisa mukutsvagiswa kweLTCC zvishandiso kuenderana kwezvinhu zvakabiridzirwa. Kana kubatanidza-kupisa kwakasiyana dielectric maturakisi (ma capacitors, resistances, inductances, makondakita, nezvimwewo), maitiro uye kupatsanurwa kweiyo interface pakati penzvimbo dzakasiyana kunofanirwa kudzorwa kuti kubatanidza-kupfura kuenzane kwega yega dielectric layer yakanaka, uye huwandu hwehuwandu uye sintering shrinkage pakati pezvikamu zvekushomeka Iyo mwero uye yekupisa yekuwedzera mwero zvakaenzana sezvinobvira kudzikisa kuitika kwekukanganisa kwakadai sekumonyoroka, kumonana uye kutsemuka.

Kazhinji kutaura, iyo shrinkage rate yezvinhu zvedongo uchishandisa LTCC tekinoroji ingangoita 15-20%. Kana iyo sintering yevaviri isingakwanise kuenzaniswa kana kuenderana, iyo interface dhata inotsemuka mushure mekutsvaira; kana izvo zvinhu zviviri zvikaita patembiricha yakakwira, iyo inokonzeresa kuita dura inokanganisa hunhu hwepakutanga hwezvinhu zvakasiyana. Iko kubatanidza-kupfekedza kuenderana kwezvinhu zviviri zvine akasiyana dielectric constants uye nziyo uye nzira yekudzora kuitirana reactivity ndiyo inotarisisa yekutsvaga. Kana iyo LTCC ichishandiswa mune yepamusoro-mashandiro masystem, kiyi yekuomesa kudzora kweiyo shrinkage maitiro ndeye kudzora iyo sintering shrinkage yeiyo LTCC yakabatana-system system. Iyo shrinkage yeiyo LTCC yakabatidzwa system pamwe neiyo XY nzira inowanzo kuve 12% kusvika 16%. Iine nerubatsiro rwekumanikidza kusasanganisa kana kumanikidza-kunobatsira sintering tekinoroji, zvigadzirwa zvine zero shrinkage munzira yeXY zvinowanikwa [17,18]. Kana uchitsvukisa, kumusoro uye pasi kweiyo LTCC yakabatanidzwa-yakagadzika inoiswa kumusoro uye pasi peiyo LTCC yakabatanidzwa-fosi seyakatetepa yekudzora dura. Iine nerubatsiro rweimwe yekubatanidza mhedzisiro pakati pechikamu chekutonga uye multilayer uye yakasimba shrinkage rate yeiyo control layer, iyo shrinkage maitiro eiyo LTCC chimiro pamwe neiyo X uye Y madhairekitori. Kuti ubhadhare kurasikirwa kwekudzikira kweiyo substrate munzira yeXY, iyo substrate ichabhadharwa shrinkage munzira yeZ. Nekuda kweizvozvo, saizi shanduko yeiyo LTCC chimiro mune X uye Y mafambiro ingangoita 0.1%, nekudaro kuve nekumira nekurongeka kweiyo wiring nemakomba mushure mekutsvedza, uye nekuona mhando yechigadzirwa.