Izidingo zezinto ze-LTCC
Izidingo zezinto ezibonakalayo zamadivayisi we-LTCC zifaka izakhiwo zikagesi, izakhiwo ze-thermomechanical kanye nezakhiwo zenqubo.

Ukusebenza kwe-dielectric njalo kuyinto ebaluleke kakhulu yezinto ze-LTCC. Njengoba iyunithi eyisisekelo yedivayisi yemvamisa yomsakazo-ubude be-resonator buhambisana ngokulingana nempande eyisikwele yokuguquguquka kwe-dielectric kokuqukethwe, lapho imvamisa yokusebenza yedivayisi iphansi (njengamakhulu ama-MHz), uma kusetshenziswa i-dielectric engaguquki njalo, usayizi wedivayisi uzobe mkhulu kakhulu ukuthi ungasetshenziswa. Ngakho-ke, kungcono ukufaka i-serial ye-dielectric njalo ukuze ivumelane amaza ahlukahlukene wokusebenza.

Ukulahleka kwe-dielectric kubuye kube yipharamitha ebalulekile ebhekwayo ekwakhiweni kwamadivayisi wemvamisa yomsakazo, futhi ihlobene ngqo nokulahleka kwedivayisi. Ngokombono, okuncane kungcono. I-coefficient lokushisa lokuguquguquka kwe-dielectric ipharamitha ebalulekile enquma ukuzinza kokushisa kokusebenza kagesi kwensimbi yamaza omsakazo.

Ukuze kuqinisekiswe ukuthembeka kwamadivayisi we-LTCC, izakhiwo eziningi ze-thermo-mechanical kufanele futhi zibhekwe lapho kukhethwa izinto zokwakha. Okubaluleke kakhulu ukulingana kokunwetshwa okushisayo, okufanele kufane nebhodi lesifunda elizothengiswa ngangokunokwenzeka. Ngaphezu kwalokho, ucubungula ukucubungula nezicelo zesikhathi esizayo, izinto zokwakha ze-LTCC kufanele futhi zihlangabezane nezidingo eziningi zokusebenza, njengokugoba amandla σ, ukuqina kwe-Hv, ubucayi bendawo, i-elastic modulus E nobulukhuni be-KIC njalonjalo.

“Ukusebenza kwenqubo ngokuvamile kungabandakanya lezi zici ezilandelayo: Okokuqala, kungashiswa ngamazinga okushisa angaphansi kuka-900 ° C ku-microstructure eminyene, engeyona impophoma. Okwesibili, ukushisa kokuqina akumele kube phansi kakhulu, ukuze kungavimbeli ukukhishwa kwezinto eziphilayo ku-paste yesiliva nebhande eliluhlaza. Okwesithathu, ngemuva kokungeza izinto ezifanele zemvelo, ingaphonswa kuteyipu eluhlaza efanayo, ebushelelezi futhi eqinile.

Ukuhlukaniswa kwezinto ze-LTCC
Njengamanje, izinto zokwakha ze-LTCC zakhiwe ikakhulukazi ngezinhlelo ezimbili, okungukuthi uhlelo lwe “glass-ceramic” kanye nohlelo lwe “glass + ceramic”. Ukushaywa nge-oxide encibilika kancane noma ingilazi encibilika kancane kunganciphisa ukushisa kokushisa kwezinto zokwenza izinto ze-ceramic, kepha ukunciphisa izinga lokushisa lokushisa kunqunyelwe, futhi ukusebenza kwendaba kuzolimala ngamazinga ahlukahlukene. Ukufunwa kwezinto zokwenziwa nge-ceramic ezinamazinga okushisa aphansi okushisa kungakhanga abacwaningi. Izinhlobo eziyinhloko zezinto ezinjalo ezithuthukiswayo yi-barium tin borate (BaSn (BO3) 2) uchungechunge, uchungechunge lwe-germanate kanye ne-tellurate, uchungechunge lwe-BiNbO4, uchungechunge lwe-Bi203-Zn0-Nb205, uchungechunge lwe-ZnO-TiO2 nezinye izinto zobumba. Eminyakeni yamuva nje, iqembu locwaningo lukaZhou Ji e-Tsinghua University lizinikele ekwenzeni ucwaningo kule ndawo.
Izakhiwo zezinto ze-LTCC
Ukusebenza kwemikhiqizo ye-LTCC kuncike ngokuphelele ekusebenzeni kwezinto ezisetshenzisiwe. Izinto ze-LTCC zobumba ikakhulukazi zifaka izinto zangaphansi ze-LTCC, izinto zokupakisha nezinto zedivayisi ye-microwave. Ukungaguquguquki kwe-dielectric impahla ebaluleke kakhulu yezinto ze-LTCC. Ukusebenza kwe-dielectric kuyadingeka ukuthi kwenziwe i-serial ku-2 kuye ku-20000 ukuze ilungele amaza ahlukahlukene wokusebenza. Isibonelo, i-substrate enemvume ehlobene no-3.8 ilungele ukwakhiwa kwamasekethe edijithali ashesha kakhulu; i-substrate enokuvumela okulinganiselwe okungu-6 kuya ku-80 ingaqedela kahle ukwakheka kwamasekethe anemvamisa ephezulu; i-substrate enemvume ehlobene efinyelela ku-20,000 3 ingenza amadivayisi anamandla aphakeme ahlanganiswe nesakhiwo se-multilayer. Imvamisa ephezulu umkhuba osobala ekuthuthukiseni imikhiqizo ye-digital 10C. Ukwakhiwa kwezinto ezisezingeni eliphansi ze-dielectric (ε≤901) ze-LTCC ukuhlangabezana nezidingo zemvamisa ephezulu nesivinini esikhulu kuyinselelo yokuthi izinto ze-LTCC zingakwazi kanjani ukuzivumelanisa nezicelo zemvamisa ephezulu. Ukusebenza kwe-dielectric njalo kohlelo lwe-6 lweFerroA5.2 neDuPont kungu-5.9 kuye ku-4110, i-70-4.3C ye-ESL ingu-4.7 kuye ku-3.9, i-dielectric eqhubekayo ye-NEC’s LTCC substrate icishe ibe yi-2.5, kanti i-dielectric ehlale iphansi njengo-XNUMX ​​isakhiwa.

Usayizi we-resonator ulingana ngokuhlukile nempande eyisikwele yokuguquguquka kwe-dielectric, ngakho-ke uma isetshenziswa njengezinto zedijithali, i-dielectric njalo iyadingeka ukuthi ibe nkulu ukunciphisa usayizi wedivayisi. Njengamanje, umkhawulo wokulahleka kwe-ultra-low noma i-ultra-high Q value, i-permittivity yesihlobo (> 100) noma> Izinto zedielectric eziyi-150 yizindawo zokucwaninga. Kumasekethe adinga amandla amakhulu, kungasetshenziswa izinto ezinokuguquguquka okuphezulu kwe-dielectric, noma ungqimba wezinto ezinamandla we-dielectric ongahlala njalo we-dielectric ungabekwa phakathi kongqimba lwe-LTCC dielectric ceramic substrate material, futhi i-dielectric njalo ingaba phakathi kuka-20 no-100. Khetha phakathi . Ukulahleka kwe-dielectric kubuye kube yipharamitha ebalulekile okufanele icatshangelwe ekwakhiweni kwamadivayisi wemvamisa yomsakazo. Ihlobene ngqo nokulahleka kwedivayisi. Ngokombono, kunethemba lokuthi okuncane kuzoba ngcono. Njengamanje, izinto ze-LTCC ezisetshenziswa kumadivayisi wemvamisa yomsakazo ikakhulukazi iDuPont (951,943), iFerro (A6M, A6S), iHeraeus (CT700, CT800 ne-CT2000) ne-Electro-science Laboratories. Abakwazi ukunikeza kuphela i-serial ye-LTCC tape eluhlaza yobumba ngokuqhubekayo kwe-dielectric, kepha futhi banikezela ngezinto zokwakha ezifanayo.

Olunye udaba olushisayo ocwaningweni lwezinto ze-LTCC ukuhambisana kwezinto ezisetshenzisiwe. Lapho kuhlanganiswa ngokudubula izendlalelo ezihlukile zedielectri (ama-capacitors, ukumelana, ama-inductances, ama-conductor, njll.), Ukusabela kanye nokwahlukaniswa kwesixhumi esibonakalayo phakathi kwezindawo zokuxhumana ezahlukahlukene kufanele kulawulwe ukwenza ukufaniswa kokudubula kongqimba ngalunye lwe-dielectric kube kuhle, nezinga lokuminyana kanye nokuhluza ukuncipha phakathi kwezendlalelo zesixhumi esibonakalayo Izinga nokukhula kokushisa okushisayo kuyafana ngangokunokwenzeka ukunciphisa ukwenzeka kwamaphutha njengokuphalaza, ukusonteka nokuqhekeka.

Ngokuvamile, izinga lokuncipha kwezinto zobumba ezisebenzisa ubuchwepheshe be-LTCC cishe liyi-15-20%. Uma ukuhayiza kwalokhu okubili kungalingani noma kuhambisane, ungqimba lwesixhumi esibonakalayo luzohlukaniswa ngemuva kokuminyaniswa; uma lezi zinto ezimbili zisabela ekushiseni okuphezulu, ungqimba lokuphendula oluzoba khona luzothinta izici zokuqala zezinto ezifanele. Ukusebenzisana kokudubula ngokubili kwezinto ezimbili ezinezakhi ezahlukahlukene zedielectric nezingqimba nokuthi ungakunciphisa kanjani ukwenziwa kabusha kokunye ukugxila kocwaningo. Lapho i-LTCC isetshenziswa ezinhlelweni zokusebenza okuphezulu, isihluthulelo sokulawulwa okuqinile kokuziphatha kwe-shrinkage ukulawula ukuncipha kokuncipha kohlelo oluhlanganisiwe lwe-LTCC. Ukuncipha kohlelo oluhlanganisiwe lwe-LTCC eceleni kwesiqondisi se-XY imvamisa kungu-12% kuye ku-16%. Ngosizo lobucwebe obungenacindezelo noma ubuchwepheshe bokusiza bokusiza okucindezelwa, izinto ezinokuncipha kwe-zero ohlangothini lwe-XY ziyatholakala [17,18]. Lapho kusongwa, phezulu nangaphansi koqweqwe oluhlanganisiwe lwe-LTCC kubekwa phezulu nangaphansi koqweqwe oluhlanganisiwe lwe-LTCC njengengqimba yokulawula ukuncipha. Ngosizo lwomphumela othile wokubopha phakathi kwesendlalelo sokulawula kanye ne-multilayer kanye nezinga eliqinile lokuncipha kwesendlalelo sokulawula, isimilo sokuncipha kwesakhiwo se-LTCC eceleni kwezikhombisi ze-X ne-Y sikhawulelwe. Ukuze unxephezele ukulahleka kwe-shrinkage kwe-substrate ngendlela ye-XY, i-substrate izonxeshezelwa ngokuncipha ku-Z direction. Ngenxa yalokhu, ushintsho losayizi wesakhiwo se-LTCC kuzikhombisi ze-X no-Y lumayelana ne-0.1% kuphela, ngaleyo ndlela kuqinisekiswe ukuma nokunemba kwezintambo nezimbobo ngemuva kokuncibilika, nokuqinisekisa ikhwalithi yedivayisi.