MOEMS wata fasaha ce mai tasowa wacce ta zama ɗaya daga cikin shahararrun fasahohi a duniya. MOEMS shine tsarin micro-electro-mechanical (MEMS) wanda ke amfani da tsarin photonic. Ya ƙunshi micro-mechanical optical modulators, micro-mechanical optical switches, ICs da sauran abubuwan da aka gyara, kuma yana amfani da miniaturization, multiplicity, da microelectronics na fasahar MEMS don cimma nasarar haɗin kai na na’urorin gani da na’urorin lantarki. A taƙaice, MOEMS shine ƙarin haɗin kai na kwakwalwan matakin-tsari. Idan aka kwatanta da manya-manyan na’urorin opto-kanikanci, PCB ƙira na’urorin MOEMS sun fi ƙanƙanta, masu sauƙi, sauri (tare da mitar sauti mafi girma), kuma ana iya samar da su cikin batches. Idan aka kwatanta da hanyar waveguide, wannan hanyar sarari kyauta tana da fa’idodin ƙananan asarar haɗin haɗin gwiwa da ƙaramar magana. Canje-canje a cikin hotuna da fasahar bayanai sun haɓaka ci gaban MOEMS kai tsaye. Hoto 1 yana nuna alaƙa tsakanin microelectronics, micromechanics, optoelectronics, fiber optics, MEMS da MOEMS. A zamanin yau, fasahar sadarwa tana haɓaka cikin sauri kuma ana sabunta su akai-akai, kuma zuwa 2010, saurin buɗewar haske zai iya kaiwa Tb/s. Haɓaka ƙimar bayanai da haɓaka sabbin kayan buƙatun kayan aiki sun haifar da buƙatar MOEMS da haɗin haɗin kai, kuma aikace-aikacen ƙirar PCB na na’urorin MOEMS a fagen optoelectronics yana ci gaba da girma.

Tsarin PCB da hanyar tattara bayanai na na’urorin MOEMS

Tsarin PCB MOEMS na’urorin MOEMS da fasaha ƙirar PCB na’urorin MOEMS sun kasu kashi-kashi, rarrabawa, watsawa, da nau’ikan tunani gwargwadon ka’idodin aikinsu na zahiri (duba Table 1), kuma yawancinsu suna amfani da na’urori masu nuni. MOEMS ya sami babban ci gaba a cikin ƴan shekarun da suka gabata. A cikin ‘yan shekarun nan, saboda karuwar buƙatun sadarwa mai sauri da watsa bayanai, bincike da haɓaka fasahar MOEMS da na’urorinta sun sami kuzari sosai. Ƙarƙashin asarar da ake buƙata, ƙarancin hankali na EMV, da ƙaramar madaidaicin ƙimar bayanai yana nuna haske ƙirar PCB na’urorin MOEMS an haɓaka su.

A zamanin yau, ban da na’urori masu sauƙi irin su masu saurin gani na gani (VOA), ana kuma iya amfani da fasahar MOEMS don samar da na’urorin da za a iya gani a tsaye a tsaye (VCSEL), na’urori masu daidaitawa, na’urorin tantance hotuna masu amfani da na’urorin zaɓe da sauran na’urorin gani. Abubuwan da ke aiki da masu tacewa, masu juyawa na gani, ƙarawa / sauke maɓalli na gani (OADM) da sauran abubuwan haɗin kai na gani da manyan haɗe-haɗe na gani (OXC).

A cikin fasahar bayanai, ɗaya daga cikin maɓallan aikace-aikacen gani shine kasuwancin haske. Baya ga tushen hasken monolithic (kamar tushen hasken zafi, LEDs, LDs, da VCSELs), tushen hasken MOEMS tare da na’urori masu aiki sun damu musamman. Misali, a cikin VCSEL mai kunnawa, za a iya canza tsawon raƙuman fitar da na’urar resonator ta hanyar canza tsayin resonator ta micromechanics, ta yadda za a gane fasahar WDM mai girma. A halin yanzu, an ɓullo da hanyar gyara cantilever na goyan baya da tsari mai motsi tare da hannun tallafi.

MOEMS na gani na gani tare da madubai masu motsi da na’urorin madubi kuma an ƙirƙira su don haɗa OXC, layi ɗaya, da kunnawa/kashe arrays. Hoto 2 yana nuna sararin samaniya na MOEMS fiber optic switch, wanda ke da nau’i-nau’i na nau’i-nau’i na U-dimbin yawa don motsi na fiber na gefe. Idan aka kwatanta da canjin jagorar raƙuman ruwa na gargajiya, fa’idodinsa shine ƙarancin asarar haɗin haɗin gwiwa da ƙarami na ƙetare.

Na’urar tacewa tare da kewayon ci gaba da daidaitawa shine na’ura mai mahimmanci a cikin hanyar sadarwa ta DWDM mai mahimmanci, kuma MOEMS F_P tace ta amfani da tsarin kayan aiki daban-daban an ɓullo da su. Saboda sassaucin injina na diaphragm mai kunnawa da ingantaccen tsayin rami na gani, kewayon tsayin tsayin waɗannan na’urori shine kawai 70nm. Kamfanin OpNext na Japan ya ƙera matatar MOEMS F_P tare da faɗin rikodin rikodi. Tacewar ta dogara ne akan fasahar InP/ iska mai yawa MOEMS. Tsarin tsaye ya ƙunshi yadudduka 6 na dakatarwar InP diaphragms. Fim ɗin tsari ne na madauwari kuma yana goyan bayan firam ɗin dakatarwa uku ko huɗu. Haɗin tebur mai goyan bayan rectangular. Fitar ta F_P mai ci gaba tana da faffadan tasha, tana rufe tagogin sadarwa na gani na biyu da na uku (1 250 ~ 1800 nm), fadin tsayinsa na daidaitawa ya fi 112 nm, kuma karfin wutar lantarki ya yi kasa da 5V.

MOEMS ƙira da fasahar samarwa Yawancin fasahar samar da MOEMS ta samo asali ne kai tsaye daga masana’antar IC da ka’idodin masana’anta. Sabili da haka, ana amfani da fasahar micro-machining na jiki da surface da fasaha mai girma micro-machining (HARM) a cikin MOEMS. Amma akwai wasu ƙalubale kamar girman mutu, daidaiton kayan abu, fasaha mai girma uku, yanayin yanayin ƙasa da sarrafa na ƙarshe, rashin daidaituwa da yanayin zafin jiki.