ʻO MOEMS kahi ʻenehana hou i lilo i hoʻokahi o nā ʻenehana kaulana loa i ka honua. ʻO MOEMS kahi ʻōnaehana micro-electro-mechanical (MEMS) e hoʻohana ana i kahi ʻōnaehana photonic. Loaʻa iā ia nā micro-mechanical optical modulators, micro-mechanical optical switch, ICs a me nā mea ʻē aʻe, a hoʻohana i ka miniaturization, multiplicity, a me microelectronics o ka ʻenehana MEMS e hoʻokō i ka hoʻohui Seamless o nā mea optical a me nā mea uila. ʻO ka waiho wale ʻana, ʻo MOEMS ka hoʻohui hou ʻana o nā ʻāpana pae ʻōnaehana. Hoʻohālikelike ʻia me nā mea hana opto-mechanical nui, PCB ʻOi aku ka liʻiliʻi, māmā, wikiwiki (me ke alapine resonance kiʻekiʻe), a hiki ke hana ʻia nā mea hana MOEMS. Ke hoʻohālikelike ʻia me ke ʻano alakaʻi nalu, ʻo kēia ʻano kaʻawale kaʻawale nā ​​mea maikaʻi o ka poho hoʻohui haʻahaʻa a me ka crosstalk liʻiliʻi. ʻO nā hoʻololi i nā photonics a me ka ʻenehana ʻike ua hoʻolaha pololei i ka hoʻomohala ʻana o MOEMS. Hōʻike ka 1 i ka pilina ma waena o nā microelectronics, micromechanics, optoelectronics, fiber optics, MEMS a me MOEMS. I kēia mau lā, ke ulu wikiwiki nei ka ʻenehana ʻike a hoʻonui mau ʻia, a ma ka 2010, hiki i ka wikiwiki o ka wehe ʻana o ka māmā ke hiki i Tb/s. ʻO ka hoʻonui ʻana i nā helu ʻikepili a me nā koi o nā mea hana hou aʻe i koi ʻia i ka noi no ka MOEMS a me nā interconnects optical, a ke hoʻomau nei ka hoʻohana ʻana o ka PCB design MOEMS ma ke kula o ka optoelectronics.

ʻO ka hoʻolālā PCB a me ka nānā ʻana i ke ʻano o ka hoʻopili ʻana o nā mea MOEMS

Hoʻolālā ʻo PCB i nā mea MOEMS a me ka ʻenehana PCB hoʻolālā MOEMS ua māhele ʻia nā ʻano mea ʻokoʻa, ʻokoʻa, hoʻouna, a me nā ʻano noʻonoʻo e like me kā lākou mau kumu hana kino (e nānā i ka Papa 1), a ʻo ka hapa nui o lākou e hoʻohana i nā mea hoʻonaninani. Ua loaʻa i ka MOEMS ka hoʻomohala koʻikoʻi i nā makahiki i hala iho nei. I nā makahiki i hala iho nei, ma muli o ka piʻi ʻana o ka noi no ka kamaʻilio kiʻekiʻe a me ka lawe ʻana i ka ʻikepili, ua hoʻoulu nui ʻia ka noiʻi a me ka hoʻomohala ʻana o ka ʻenehana MOEMS a me kāna mau mea hana. ʻO ka pohō haʻahaʻa i makemake ʻia, haʻahaʻa haʻahaʻa haʻahaʻa EMV, a me ka crosstalk haʻahaʻa haʻahaʻa kiʻekiʻe kiʻekiʻe i hōʻike ʻia i ka māmā PCB hoʻolālā MOEMS i kūkulu ʻia.

I kēia mau lā, ma kahi o nā mea maʻalahi e like me nā attenuators optical variable (VOA), hiki ke hoʻohana ʻia ka ʻenehana MOEMS e hana i nā lasers tunable vertical cavity surface emitting lasers (VCSEL), optical modulators, tunable wavelength selective photodetectors a me nā mea ʻē aʻe. ʻO nā mea hana a me nā kānana, nā hoʻololi opua, programmable wavelength optical add/drop multiplexers (OADM) a me nā mea ʻokoʻa passive ʻē aʻe a me nā mea hoʻohui kea ākea nui (OXC).

I ka ʻenehana ʻike, ʻo kekahi o nā kī i nā noi optical ʻo ia nā kumu kukui kūʻai. Ma waho aʻe o nā kumu kukui monolithic (e like me nā kumu hoʻoheheʻe wela, nā LED, nā LD, a me nā VCSEL), pili pono nā kumu kukui MOEMS me nā mea hana. No ka laʻana, i loko o kahi VCSEL hiki ke hoʻololi ʻia, hiki ke hoʻololi i ka lōʻihi o ka hawewe o ka resonator ma o ka hoʻololi ʻana i ka lōʻihi o ka resonator e nā micromechanics, a laila e ʻike ai i ka ʻenehana WDM kiʻekiʻe. I kēia manawa, ua hoʻomohala ʻia kahi ʻano hana hoʻokani cantilever kākoʻo a me kahi hale hoʻoneʻe me kahi lima kākoʻo.

Ua hoʻomohala pū ʻia nā hoʻololi ʻike MOEMS me nā aniani hoʻoneʻe a me nā ʻāpana aniani no ka hoʻohui ʻana i nā mea hoʻololi OXC, hoʻohālikelike, a me ka hoʻoneʻe ʻana. Hōʻike ka Kiʻi 2 i kahi hoʻololi fiber optic MOEMS manuahi, nona nā mea hoʻokele cantilever U-like no ka neʻe ʻana o ka fiber. Ke hoʻohālikelike ʻia me ka hoʻololi alakaʻi nalu maʻamau, ʻo kāna mau mea maikaʻi ʻo ia ka poho hoʻohui haʻahaʻa a me ka crosstalk liʻiliʻi.

ʻO kahi kānana optical me kahi ākea o ka hoʻololi mau ʻana he mea koʻikoʻi loa ia i kahi pūnaewele DWDM loli, a ua hoʻomohala ʻia nā kānana MOEMS F_P e hoʻohana ana i nā ʻōnaehana waiwai. Ma muli o ka hikiwawe mechanical o ka diaphragm tunable a me ka lōʻihi o ka lua opipika, ʻo 70nm wale nō ka lōʻihi o ka nalu o kēia mau mea. Ua hoʻomohala ka hui ʻo OpNext o Iapana i kahi kānana MOEMS F_P me ka laulā hiki ke hoʻopaʻa ʻia. Hoʻokumu ʻia ka kānana ma ka ʻenehana InP/air gap MOEMS. Hoʻokumu ʻia ka hoʻolālā kūpaʻa me 6 mau papa o nā diaphragms InP i hoʻokuʻu ʻia. ʻO ke kiʻiʻoniʻoni he ʻano pōʻai puni a kākoʻo ʻia e ʻekolu a ʻehā mau papa hoʻomaha. Hoʻohui papaʻaina kākoʻo rectangular. ʻO kāna kānana F_P hiki ke hoʻomau ʻia he pā ākea ākea loa, e uhi ana i ka lua a me ke kolu o nā puka makani kamaʻilio optical (1 250 ~ 1800 nm), ʻoi aku ka nui o ka laulā o ka hawewe ma mua o 112 nm, a ʻo ka haʻahaʻa haʻahaʻa e like me 5V.

Hoʻolālā a me ka ʻenehana hana MOEMS ʻO ka hapa nui o ka ʻenehana hana MOEMS i hoʻomohala pololei ʻia mai ka ʻoihana IC a me kāna mau hana hana. No laila, hoʻohana ʻia ka ʻenehana micro-machining kino a me ka surface a me ka ʻenehana micro-machining kiʻekiʻe (HARM) i MOEMS. Akā aia kekahi mau pilikia e like me ka nui o ka make, ka like ʻana o nā mea, ka ʻenehana ʻekolu-dimensional, ka topography o ka ʻili a me ka hoʻoponopono hope ʻana, ka like ʻole a me ka ʻike wela.