MOEMS bụ teknụzụ na-apụta nke ghọrọ otu n’ime teknụzụ kachasị ewu ewu n’ụwa. MOEMS bụ sistemụ micro-electro-mechanical (MEMS) nke na-eji sistemu fotonic. Ọ nwere micro-mechanical optical modulators, micro-mechanical optical switches, ICs na ihe ndị ọzọ, ma na-eji miniaturization, multiplicity, na microelectronics nke teknụzụ MEMS iji nweta ntinye nke ngwa anya na ngwaọrụ eletrik. N’ikwu ya n’ụzọ dị mfe, MOEMS bụ ntinye n’ihu nke ibe-ọkwa sistemụ. Tụnyere nnukwu ngwaọrụ opto-mechanical, PCB imewe ngwaọrụ MOEMS pere mpe, dị ọkụ, dị ngwa ngwa (nwere ugboro ugboro dị elu), enwere ike imepụta ya na batches. E jiri ya tụnyere usoro waveguide, usoro oghere a na-akwụghị ụgwọ nwere uru dị na mfu njikọ dị ala yana obere okwu mkparịta ụka. Mgbanwe nke photonics na teknụzụ ozi akwalitela mmepe MOEMS ozugbo. Ọgụgụ 1 na-egosi mmekọrịta dị n’etiti microelectronics, micromechanics, optoelectronics, fiber optics, MEMS na MOEMS. N’oge a, teknụzụ ozi na-etolite ngwa ngwa ma na-emelite mgbe niile, na site na 2010, ọsọ nke oghere ọkụ nwere ike iru Tb/s. Ọnụ ọgụgụ data na-abawanye na arụmọrụ dị elu chọrọ akụrụngwa ọgbọ ọhụrụ emeela ka a na-achọ MOEMS na njikọ njikọ anya, yana ngwa PCB chepụta ngwaọrụ MOEMS n’ọhịa nke optoelectronics na-aga n’ihu na-eto eto.

Nhazi PCB na usoro nkwakọ ngwaahịa nke ngwaọrụ MOEMS

PCB imewe MOEMS ngwaọrụ na teknụzụ PCB imewe MOEMS ngwaọrụ na-ekewa n’ime nnyonye anya, diffraction, nnyefe, na echiche ụdị dị ka anụ ahụ ha ụkpụrụ ụkpụrụ (lee Isiokwu 1), na ọtụtụ n’ime ha na-eji reflective ngwaọrụ. MOEMS enwetala nnukwu mmepe n’ime afọ ole na ole gara aga. N’ime afọ ndị na-adịbeghị anya, n’ihi mmụba nke ọchịchọ maka nkwurịta okwu ngwa ngwa na nnyefe data, nyocha na mmepe nke teknụzụ MOEMS na ngwaọrụ ya emeela nke ukwuu. Ọnwụ dị ala achọrọ, mmetụta EMV dị ala, yana ọnụ ọgụgụ data dị elu nke dị ala gosipụtara ìhè PCB chepụta ngwaọrụ MOEMS ka emepụtara.

N’oge a, na mgbakwunye na ngwaọrụ dị mfe dị ka mgbanwe anya attenuators (VOA), a pụkwara iji nkà na ụzụ MOEMS mepụta lasers vetikal cavity surface emitting lasers (VCSEL), modulators optical, tunable wavelength selective photodetectors na ngwa anya ndị ọzọ. Ngwa na nzacha na-arụ ọrụ na nzacha, ngwa ngbanwe ngwa anya, ihe mgbakwunye / dobe multiplexers (OADM) na ngwa anya ngwa anya ndị ọzọ na nnukwu njikọ njikọ anya (OXC).

Na teknụzụ ozi, otu igodo maka ngwa anya bụ isi iyi ọkụ na-ere ahịa. Na mgbakwunye na isi iyi ọkụ monolithic (dị ka isi mmalite radieshon, LEDs, LDs, na VCSELs), ebe ọkụ MOEMS nwere ngwaọrụ ndị na-arụ ọrụ na-enwe nchegbu karịsịa. Dịka ọmụmaatụ, n’ime VCSEL a na-emegharị emegharị, enwere ike ịgbanwe ogologo ikuku ikuku nke resonator site n’ịgbanwe ogologo nke resonator site na micromechanics, si otú ahụ na-achọpụta nkà na ụzụ WDM dị elu. Ka ọ dị ugbu a, e mepụtala usoro nlegharị anya cantilever na ihe a na-ebugharị nke nwere ogwe aka nkwado.

MOEMS optical switches nwere enyo mbugharị na ihe nrụnye enyo ka emebekwara maka ịgbakọta OXC, myirịta na mgbanyụ ọkụ. Onyonyo 2 na-egosi oghere MOEMS fiber optic mgba ọkụ, nke nwere otu ụzọ cantilever nke nwere ụdị U maka mmegharị mpụta nke eriri ahụ. E jiri ya tụnyere mgba ọkụ ebili mmiri ọdịnala, uru ya bụ mfu njikọ dị ala yana obere okwu mkparịta ụka.

Ihe nzacha anya nke nwere ọtụtụ ihe na-agbanwe agbanwe bụ ngwaọrụ dị oke mkpa na netwọk DWDM na-agbanwe agbanwe, na ihe nzacha MOEMS F_P na-eji usoro ihe dị iche iche emepụtara. N’ihi ngbanwe nke igwe nke diaphragm na-emegharị anya na ogologo oghere anya dị irè, ogologo ogologo oge nke ngwaọrụ ndị a bụ naanị 70nm. Ụlọ ọrụ OpNext nke Japan ewepụtala ihe nzacha MOEMS F_P nwere obosara nwere ike ịdekọ ndekọ. Nzacha ahụ dabere na teknụzụ MOEMS dị iche iche InP/ikuku. Ihe nhazi kwụ ọtọ bụ akwa 6 nke diaphragms InP kwụsịtụrụ. Ihe nkiri a bụ okirikiri okirikiri ma na-akwado ya site na okpokolo agba nkwusioru atọ ma ọ bụ anọ. Njikọ tebụl nkwado akụkụ anọ. Ihe nzacha ya na-aga n’ihu na-aga n’ihu F_P nwere nnukwu nkwụsị nkwụsị, na-ekpuchi windo nkwurịta okwu nke abụọ na nke atọ (1 250 ~ 1800 nm), obosara ya na-emegharị n’ogologo ya karịrị 112 nm, voltaji actuation dị ka 5V.

MOEMS imewe na teknụzụ mmepụta Ọtụtụ teknụzụ mmepụta MOEMS sitere na ụlọ ọrụ IC na ụkpụrụ nrụpụta ya. Ya mere, a na-eji teknụzụ micro-machining anụ ahụ na elu elu na teknụzụ micro-machining (HARM) dị elu na MOEMS. Mana enwere ihe ịma aka ndị ọzọ dị ka nha anwụ anwụ, ịdị n’otu ihe, teknụzụ akụkụ atọ, eserese elu na nhazi ikpeazụ, enweghị isi na mmetụta okpomọkụ.