I-MOEMS ubuchwepheshe obusafufusa osebube obunye bobuchwepheshe obudume kakhulu emhlabeni. I-MOEMS iyisistimu ye-micro-electro-mechanical (MEMS) esebenzisa isistimu yezithombe. Iqukethe ama-micro-mechanical optical modulators, ama-micro-mechanical optical switch, ama-IC nezinye izingxenye, futhi isebenzisa i-miniaturization, ubuningi, kanye nama-microelectronics obuchwepheshe be-MEMS ukuze kuzuzwe ukuhlanganiswa okungenamthungo kwamadivayisi abonakalayo namadivayisi kagesi. Kalula nje, i-MOEMS iwukuhlanganiswa okuqhubekayo kwama-chips ezingeni lesistimu. Uma kuqhathaniswa namadivayisi amakhulu we-opto-mechanical, PCB klama amadivayisi we-MOEMS mancane, alula, ayashesha (anemvamisa ye-resonance ephakeme), futhi angakhiqizwa ngamaqoqo. Uma kuqhathaniswa nendlela ye-waveguide, le ndlela yesikhala samahhala inezinzuzo zokulahleka okuxhumene okuphansi kanye ne-crosstalk encane. Izinguquko ku-photonics kanye nobuchwepheshe bolwazi zikhuthaze ngokuqondile ukuthuthukiswa kwe-MOEMS. Umfanekiso we-1 ubonisa ubudlelwane phakathi kwe-microelectronics, i-micromechanics, i-optoelectronics, i-fiber optics, i-MEMS kanye ne-MOEMS. Namuhla, ubuchwepheshe bolwazi buthuthuka ngokushesha futhi buvuselelwa njalo, futhi ngo-2010, isivinini sokuvula ukukhanya singafinyelela ku-Tb/s. Ukwenyuka kwamazinga edatha kanye nezidingo zemishini yesizukulwane esisha ezisebenza kahle kakhulu kuye kwaqhuba isidingo se-MOEMS nokuxhumanisa okubonakalayo, futhi ukusetshenziswa komklamo we-PCB amadivayisi we-MOEMS emkhakheni we-optoelectronics kuyaqhubeka nokukhula.

Idizayini ye-PCB nokuhlaziywa kwendlela yokupakisha yamadivayisi e-MOEMS

Idizayini ye-PCB Amadivayisi nobuchwepheshe Idizayini ye-PCB ye-MOEMS ihlukaniswe yaba yiziphazamiso, i-diffraction, transmission, nezinhlobo zokubonisa ngokuvumelana nezimiso zazo zokusebenza ngokomzimba (bheka Ithebula 1), futhi eziningi zazo zisebenzisa amadivaysi akhanyayo. I-MOEMS izuze intuthuko ebalulekile eminyakeni embalwa edlule. Eminyakeni yamuva, ngenxa yokwanda kwesidingo sokuxhumana ngesivinini esikhulu kanye nokudluliswa kwedatha, ucwaningo nokuthuthukiswa kobuchwepheshe be-MOEMS kanye namadivayisi ayo kuye kwakhuthazwa kakhulu. Ukulahlekelwa okuphansi okudingekayo, ukuzwela okuphansi kwe-EMV, kanye nenani eliphansi ledatha eliphakeme elibonisa ukukhanya kwe-PCB design amadivayisi we-MOEMS athuthukisiwe.

Namuhla, ngaphezu kwamadivayisi alula anjengama-variable optical attenuators (VOA), ubuchwepheshe be-MOEMS bungaphinda busetshenziswe ukukhiqiza ama-laser okukhipha amanzi e-cavity (VCSEL), ama-optical modulators, ama-photodetectors akhethwayo amaza amaza ashintshwayo namanye amadivaysi okubona. Izingxenye ezisebenzayo nezihlungi, ama-optical switches, i-wavelength optical optical ehlelekayo engeza/ehlisa (OADM) nezinye izingxenye ze-optical passive kanye nezixhumi ezinkulu ze-optical cross-connects (OXC).

Kubuchwepheshe bolwazi, esinye sezihluthulelo zokusetshenziswa kwe-optical imithombo yokukhanya ethengiswayo. Ngokungeziwe emithonjeni yokukhanya ye-monolithic (njengemithombo yemisebe eshisayo, ama-LED, ama-LD, nama-VCSEL), imithombo yokukhanya ye-MOEMS enamadivayisi asebenzayo ikhathazeke kakhulu. Isibonelo, ku-VCSEL eguqulekayo, ubude begagasi obuphumayo be-resonator bungashintshwa ngokushintsha ubude be-resonator ngama-micromechanics, ngaleyo ndlela kuqashelwe ubuchwepheshe obusebenza kahle kakhulu be-WDM. Njengamanje, indlela yokusekela ye-cantilever kanye nesakhiwo esinyakazayo esinengalo yokusekela sekwenziwe.

Ama-switch optical e-MOEMS anezibuko ezihambayo kanye nama-mirror array nawo athuthukisiwe ukuze ahlanganise i-OXC, i-paralleling, kanye ne-on/off switch. Umfanekiso wesi-2 ubonisa ukushintshwa kwe-fiber optic ye-MOEMS ye-free-space, enepheya lama-cantilever actuators amise okwe-U ukuze kuzuzwe i-lateral ye-fiber. Uma kuqhathaniswa nokushintshwa kwe-waveguide yendabuko, izinzuzo zayo ukulahlekelwa okuhlanganisiwe okuphansi kanye ne-crosstalk encane.

Isihlungi esibonakalayo esinobubanzi obubanzi obulungisekayo ngokuqhubekayo siyidivayisi ebaluleke kakhulu kunethiwekhi ye-DWDM eguquguqukayo, futhi izihlungi ze-MOEMS F_P ezisebenzisa amasistimu wezinto ezihlukene sezithuthukisiwe. Ngenxa yokuguquguquka kwemishini kwe-diaphragm efundekayo kanye nobude be-optical cavity obusebenzayo, ububanzi obungaguquleka be-wavelength balawa madivayisi bungu-70nm kuphela. Inkampani yase-Japan i-OpNext ithuthukise isihlungi se-MOEMS F_P esinobubanzi obuqoshwayo obufundekayo. Isihlungi sisekelwe kubuchwepheshe be-MOEMS be-InP/air gap amaningi. Isakhiwo esime mpo sakhiwe izendlalelo ezingu-6 zamadiaphragm e-InP amisiwe. Ifilimu iyisakhiwo esiyindilinga futhi isekelwa amafreyimu amisiwe amathathu noma amane. Uxhumano lwetafula lokusekela elingunxande. Isihlungi saso esiqhubekayo esiguqulekayo se-F_P sinebhande lokumisa elibanzi kakhulu, elimboza iwindi lesibili nelesithathu lokuxhumana optical (1 250 ~ 1800 nm), ububanzi be-wavelength tuning ububanzi bukhulu kuno-112 nm, futhi i-actuation voltage iphansi njengo-5V.

Ubuchwepheshe bokuklama nokukhiqiza be-MOEMS Ubuchwepheshe obuningi bokukhiqiza be-MOEMS buvele busuka embonini ye-IC kanye namazinga ayo okukhiqiza. Ngakho-ke, ubuchwepheshe be-micro-machining bomzimba nephezulu kanye nevolumu ephezulu ye-micro-machining (HARM) busetshenziswa ku-MOEMS. Kodwa kunezinye izinselelo ezinjengosayizi wokufa, ukufana kwezinto ezibonakalayo, ubuchwepheshe obunezinhlangothi ezintathu, i-surface topography kanye nokucutshungulwa kokugcina, ukungalingani kanye nokuzwela kwezinga lokushisa.