MOEMS ndiukadaulo womwe ukubwera womwe wasanduka ukadaulo wodziwika kwambiri padziko lonse lapansi. MOEMS ndi micro-electro-mechanical system (MEMS) yomwe imagwiritsa ntchito photonic system. Lili ndi ma micro-mechanical optical modulators, micro-mechanical optical switches, ICs ndi zigawo zina, ndipo amagwiritsa ntchito miniaturization, multiplicity, ndi microelectronics yaukadaulo wa MEMS kuti akwaniritse kuphatikiza kosagwirizana kwa zida zamagetsi ndi zida zamagetsi. Mwachidule, MOEMS ndikuphatikizanso kwina kwa tchipisi tadongosolo. Poyerekeza ndi zida zazikulu za opto-mechanical, PCB kupanga zida za MOEMS ndizocheperako, zopepuka, zachangu (zokhala ndi ma frequency apamwamba), ndipo zimatha kupangidwa m’magulu. Poyerekeza ndi njira ya waveguide, njira yaulere iyi ili ndi zabwino zake pakutayika kwapang’onopang’ono komanso kuphatikizika kocheperako. Kusintha kwazithunzithunzi ndi zamakono zamakono zalimbikitsa mwachindunji chitukuko cha MOEMS. Chithunzi 1 chikuwonetsa mgwirizano pakati pa ma microelectronics, micromechanics, optoelectronics, fiber optics, MEMS ndi MOEMS. Masiku ano, ukadaulo wazidziwitso ukukula mwachangu komanso kusinthidwa mosalekeza, ndipo pofika chaka cha 2010, liwiro la kutseguka kwa kuwala limatha kufika Tb/s. Kuwonjezeka kwa mitengo ya data ndi zofunikira za zida za m’badwo watsopano wamakono zachititsa kuti pakhale kufunika kwa MOEMS ndi ma interconnects optical, ndipo kugwiritsa ntchito zipangizo za PCB zojambula za MOEMS m’munda wa optoelectronics kukupitiriza kukula.

Kusanthula kwa PCB ndi kuyika njira za zida za MOEMS

PCB kapangidwe MOEMS zipangizo ndi luso PCB kapangidwe MOEMS zipangizo amagawidwa mu kusokoneza, diffraction, kufala, ndi kusinkhasinkha mitundu malinga ndi mfundo zawo zakuthupi ntchito (onani Table 1), ndipo ambiri a iwo ntchito zipangizo kuwala. MOEMS yapeza chitukuko chachikulu m’zaka zingapo zapitazi. M’zaka zaposachedwa, chifukwa cha kuchuluka kwa kufunikira kwa kulumikizana kwachangu komanso kutumiza deta, kafukufuku ndi chitukuko chaukadaulo wa MOEMS ndi zida zake zalimbikitsidwa kwambiri. Kutayika kocheperako komwe kumafunikira, kukhudzika kwa EMV, komanso kuchuluka kwa data komwe kumawonetsa mawonekedwe opepuka a PCB zida za MOEMS zapangidwa.

Masiku ano, kuphatikiza pazida zosavuta monga ma variable optical attenuators (VOA), ukadaulo wa MOEMS ungagwiritsidwenso ntchito kupanga ma lasers opangidwa ndi ma vertical cavity surface emitting lasers (VCSEL), optical modulators, tunable wavelength selective photodetectors ndi zida zina zowunikira. Zigawo zogwira ntchito ndi zosefera, zosinthira zowoneka bwino, mawonekedwe owoneka bwino owonjezera owonjezera / dontho (OADM) ndi zida zina zowoneka bwino komanso zolumikizira zazikulu zazikulu (OXC).

Muukadaulo wazidziwitso, chimodzi mwamakiyi ogwiritsira ntchito optical ndi magwero owunikira amalonda. Kuwonjezera pa magwero a kuwala kwa monolithic (monga magwero a kutentha kwa kutentha, ma LED, LDs, ndi VCSELs), magetsi a MOEMS okhala ndi zipangizo zogwira ntchito amakhudzidwa kwambiri. Mwachitsanzo, mu VCSEL yosinthika, kutalika kwa mawonekedwe a resonator kungasinthidwe mwa kusintha kutalika kwa resonator ndi micromechanics, potero kuzindikira luso lapamwamba la WDM. Pakalipano, njira yothandizira cantilever ndi njira yosunthika yokhala ndi mkono wothandizira yapangidwa.

Zosintha za MOEMS zokhala ndi magalasi osunthika ndi magalasi osiyanasiyana apangidwanso kuti azitha kuphatikiza ma OXC, ofanana, ndi on/off switch arrays. Chithunzi 2 chikuwonetsa chosinthira chaulere cha MOEMS fiber optic chosinthira, chomwe chili ndi ma cantilever owoneka ngati U-othandizira kusuntha kwa ulusi. Poyerekeza ndi kusintha kwachikhalidwe cha waveguide, zabwino zake ndi kutayika kwapang’onopang’ono komanso kuphatikizika kocheperako.

Fyuluta yamagetsi yokhala ndi mitundu yosiyanasiyana yosinthika mosalekeza ndi chipangizo chofunikira kwambiri pa netiweki ya DWDM yosinthika, ndipo zosefera za MOEMS F_P zogwiritsa ntchito zida zosiyanasiyana zapangidwa. Chifukwa cha kusinthasintha kwamakina a diaphragm yosinthika komanso kutalika kwapang’onopang’ono kwapang’onopang’ono, kutalika kwa mawonekedwe a zida izi ndi 70nm yokha. Kampani yaku Japan ya OpNext yapanga fyuluta ya MOEMS F_P yokhala ndi m’lifupi mwake. Zosefera zimatengera ukadaulo waposachedwa wa InP/air gap MOEMS. Kapangidwe koyima kumapangidwa ndi zigawo 6 za ma diaphragms a InP oimitsidwa. Kanemayo ndi mawonekedwe ozungulira ndipo amathandizidwa ndi mafelemu atatu kapena anayi oyimitsidwa. Kulumikizana kwa tebulo lothandizira kumakona anayi. F_P F_P fyuluta yake yosalekeza imakhala ndi band yotakata kwambiri, yomwe imaphimba mawindo achiwiri ndi achitatu (1 250 ~ 1800 nm), kutalika kwa mawonekedwe ake ndi aakulu kuposa 112 nm, ndipo magetsi oyendetsa ndi otsika ngati 5V.

Ukadaulo wopanga ndi kupanga wa MOEMS Ukadaulo wambiri wopanga wa MOEMS udachokera kumakampani a IC ndi momwe amapangira. Chifukwa chake, ukadaulo wamthupi ndi pamwamba wa makina opangidwa ndi ma micro-machining (HARM) amagwiritsidwa ntchito mu MOEMS. Koma palinso zovuta zina monga kukula kwa kufa, kufanana kwazinthu, ukadaulo wamitundu itatu, mawonekedwe apamwamba komanso kukonza komaliza, kusagwirizana komanso kukhudzidwa kwa kutentha.