MOEMS yog ib qho kev siv technology tshiab uas tau dhau los ua ib qho ntawm cov thev naus laus zis nrov tshaj plaws hauv ntiaj teb. MEMS yog micro-electro-mechanical system (MEMS) uas siv lub tshuab photonic. Nws muaj micro-mechanical optical modulators, micro-mechanical optical keyboards, ICs thiab lwm yam khoom, thiab siv cov miniaturization, multiplicity, thiab microelectronics ntawm MEMS thev naus laus zis kom ua tiav Seamless kev koom ua ke ntawm cov khoom siv kho qhov muag thiab cov khoom siv hluav taws xob. Cias muab, MEMS yog qhov kev koom ua ke ntxiv ntawm cov txheej txheem-qib chips. Piv nrog rau cov khoom siv opto-mechanical loj, PCB tsim MEMS cov khoom siv me me, sib zog dua, nrawm dua (nrog rau ntau dua resonance zaus), thiab tuaj yeem ua rau hauv cov khoom siv. Piv nrog rau txoj kev waveguide, qhov chaw pub dawb txoj kev no muaj qhov zoo ntawm kev sib txuas qis thiab me me crosstalk. Cov kev hloov pauv hauv photonics thiab cov ntaub ntawv thev naus laus zis tau txhawb nqa txoj kev loj hlob ntawm MEMS. Daim duab 1 qhia txog kev sib raug zoo ntawm microelectronics, micromechanics, optoelectronics, fiber optics, MEMS thiab MOEMS. Niaj hnub no, cov ntaub ntawv thev naus laus zis tau txhim kho sai thiab hloov kho tas li, thiab los ntawm 2010, qhov ceev ntawm lub teeb qhib tuaj yeem ncav cuag Tb / s. Kev nce cov ntaub ntawv thiab kev ua tau zoo dua cov cuab yeej siv tshiab tiam tshiab tau tsav qhov kev thov rau MEMS thiab kev sib txuas kho qhov muag, thiab daim ntawv thov ntawm PCB tsim MEMS cov cuab yeej hauv thaj tsam ntawm optoelectronics txuas ntxiv mus.

PCB tsim thiab ntim txoj kev tsom xam ntawm MEMS li

PCB tsim MEMS cov cuab yeej thiab thev naus laus zis PCB tsim MEMS cov cuab yeej tau muab faib ua kev cuam tshuam, sib txawv, kev sib kis, thiab hom kev xav raws li lawv lub cev ua haujlwm (saib Daim duab 1), thiab feem ntau ntawm lawv siv cov khoom siv cuam tshuam. MEMS tau ua tiav txoj kev loj hlob tseem ceeb hauv ob peb xyoos dhau los. Nyob rau hauv xyoo tas los no, vim qhov kev xav tau ntawm kev sib txuas lus ceev ceev thiab cov ntaub ntawv xa mus, kev tshawb fawb thiab kev loj hlob ntawm MEMS thev naus laus zis thiab nws cov cuab yeej tau txhawb nqa zoo heev. Qhov yuav tsum tau poob qis, qis EMV rhiab heev, thiab qis crosstalk siab cov ntaub ntawv tus nqi cuam tshuam lub teeb PCB tsim MEMS li tau tsim.

Niaj hnub no, ntxiv rau cov khoom siv yooj yim xws li cov khoom siv kho qhov muag sib txawv (VOA), MOEMS thev naus laus zis kuj tseem tuaj yeem siv los tsim cov kab noj hniav ntsug qhov chaw emitting lasers (VCSEL), optical modulators, tunable wavelength selective photodetectors thiab lwm yam khoom siv kho qhov muag. Active Cheebtsam thiab lim, optical keyboards, programmable wavelength optical add/poob multiplexers (OADM) thiab lwm yam optical passive Cheebtsam thiab loj-scale optical cross-connects (OXC).

Hauv cov ntaub ntawv thev naus laus zis, ib qho ntawm cov yuam sij rau kev siv kho qhov muag yog kev lag luam teeb pom kev zoo. Ntxiv rau qhov chaw teeb pom kev zoo monolithic (xws li qhov chaw hluav taws xob thermal, LEDs, LDs, thiab VCSELs), MEMS lub teeb qhov chaw nrog cov khoom siv muaj kev txhawj xeeb tshwj xeeb. Piv txwv li, nyob rau hauv ib tug tunable VCSEL, lub emission wavelength ntawm lub resonator tuaj yeem hloov tau los ntawm kev hloov qhov ntev ntawm lub resonator los ntawm micromechanics, yog li paub qhov ua tau zoo ntawm WDM technology. Tam sim no, txoj kev txhawb nqa cantilever tuning thiab cov qauv txav tau nrog lub caj npab txhawb nqa tau tsim.

MEMS optical keyboards nrog cov iav txav tau thiab daim iav arrays kuj tau tsim los rau kev sib sau ua ke OXC, paralleling, thiab on/off switch arrays. Daim duab 2 qhia tau hais tias qhov chaw pub dawb MEMS fiber ntau optic hloov, uas muaj ib khub ntawm U-shaped cantilever actuators rau lateral txav ntawm cov fiber ntau. Piv nrog rau cov kev hloov pauv hloov pauv, nws qhov zoo yog qhov sib txuas qis dua thiab me me crosstalk.

Lub lim dej kho qhov muag nrog ntau qhov kev hloov pauv tsis tu ncua yog ib qho tseem ceeb heev hauv DWDM network sib txawv, thiab MEMS F_P lim siv ntau yam khoom siv tau tsim. Vim lub tshuab hloov tau yooj yim ntawm cov diaphragm tunable thiab cov kab noj hniav ntev ntev, lub wavelength tunable ntau ntawm cov khoom siv no tsuas yog 70nm. Nyiv lub tuam txhab OpNext tau tsim MEMS F_P lim nrog cov ntaub ntawv dav dav. Lub lim yog raws li ntau yam InP / huab cua sib txawv MEMS thev naus laus zis. Cov qauv ntsug yog tsim los ntawm 6 txheej ntawm tshem tawm InP diaphragms. Cov yeeb yaj kiab yog ib lub voj voog thiab tau txais kev txhawb nqa los ntawm peb lossis plaub qhov kev ncua. Rectangular txhawb rooj sib txuas. Nws txuas ntxiv tunable F_P lim muaj qhov dav heev nres, npog qhov thib ob thiab thib peb qhov kev sib txuas lus kho qhov muag (1 250 ~ 1800 nm), nws lub wavelength tuning dav yog ntau dua 112 nm, thiab qhov hluav taws xob actuation yog tsawg li 5V.

MEMS tsim thiab tsim tshuab Feem ntau MOEMS cov tshuab tsim khoom ncaj qha los ntawm kev lag luam IC thiab nws cov qauv tsim khoom. Yog li ntawd, lub cev thiab nto micro-machining thiab high-volume micro-machining (HARM) technology yog siv nyob rau hauv MOEMS. Tab sis muaj lwm yam kev cov nyom xws li tuag loj, cov khoom siv uniformity, peb-dimensional technology, nto topography thiab kev ua tiav kawg, unevenness thiab kub rhiab heev.