Kushanda kwemalaser kugadzira tekinoroji mu inochinjika redunhu bhodhi

Yakakwira kuwanda inoshanduka wedunhu bhodhi chikamu cheyese inochinjika redunhu bhodhi, iyo inowanzo kutsanangurwa seye tambo kusiyanisa isingasviki 200 μ M kana micro kuburikidza isingasviki 250 μ M inoshanduka wedunhu bhodhi. Yakakwira diki inoshanduka inoshanduka redunhu bhodhi ine akasiyana maficha, senge kufonera, makomputa, akasanganiswa maseketi uye zvekurapa zvekushandisa. Tichifunga nezvezvakakosha zvimiro zveanoshanduka wedunhu bhodhi zvinhu, bepa rino rinounza mamwe matambudziko akakosha kuti atariswe mukugadziriswa kwemalaser yeakakwira-density inoshanduka wedunhu bhodhi uye micro kuburikidza nekuchera p>

Iwo akasarudzika maitiro eanoshanduka wedunhu bhodhi anoita kuti ive imwe nzira kune akaomarara wedunhu bhodhi uye echinyakare wiring scheme mune dzakawanda nguva. Panguva imwecheteyo, inosimudzirawo kuvandudzwa kwenzvimbo dzakawanda nyowani. Chikamu chinokurumidza kukura cheFPC ndiyo yemukati yekubatanidza mutsara wecomputer hard disk drive (HDD). Iyo yemagineti musoro weiyo hard disk inofanirwa kuenda nekudzoka pane iyo inotenderera dhisiki yekutarisa, uye inochinja dunhu inogona kushandiswa kutsiva tambo kuti ione kubatana pakati pes mobile magineti musoro neiyo control redunhu bhodhi. Vagadziri vehard disk vanowedzera kugadzirwa uye vanoderedza mutengo wegungano kuburikidza nehunyanzvi hunodaidzwa kuti “yakasimudzwa inochinja ndiro” (FOS). Uye zvakare, tekinoroji yekumisa isina waya ine zvirinani kudengenyeka kwenyika uye inogona kugadzirisa kuvimbika kwechigadzirwa. Imwe yepamusoro-density density inochinja bhodhi redunhu rinoshandiswa mune rakaomarara diski is interposer flex, iyo inoshandiswa pakati pekumiswa uye controller.

Iyo yechipiri inokura munda weFPC inyowani yakasanganiswa yedunhu kurongedza. Anochinjika macircuit anoshandiswa mu chip level kurongedza (CSP), yakawanda chip module (MCM) uye chip pane inochinjika redunhu bhodhi (COF). Pakati pavo, CSP yemukati redunhu ine musika wakakura, nekuti inogona kushandiswa mune semiconductor zvishandiso uye flash memory, uye inoshandiswa zvakanyanya mumakadhi ePCMCIA, madhiraivha dhisiki, vabatsiri veadhijitari vega (PDAs), nhare mbozha, pager Dhijitari kamera uye digital kamera . Uye zvakare, yemvura kristaro inoratidzira (LCD), polyester firimu switch uye ink-jet purinda katuriji mamwe matatu matatu ekukura mashandisirwo ekushandisa minda yeakakwira-kuwanda anochinja wedunhu bhodhi \

Iko musika kugona kweanoshanduka mutsara tekinoroji mumidziyo inotakurika (senge nhare mbozha) yakakura kwazvo, inova yakasikwa chaizvo, nekuti izvi zvishandiso zvinoda vhoriyamu diki uye huremu hwakareruka kusangana nezvinodiwa nevatengi; Uye zvakare, izvo zvazvino kushandisa kweanoshanduka tekinoroji inosanganisira flat mapuratifomu ekuratidzira uye zvekurapa zvishandiso, izvo zvinogona kushandiswa nevakagadziri kudzikisa huwandu uye huremu hwezvigadzirwa senge zvekunzwa zvinobatsira uye zvevanhu zvinomisikidzwa.

Kukura kukuru muminda iri pamusoro kwapa kuti kuwedzere kuburitsa kwepasirese kwemabhodhi edunhu anotenderera. Semuenzaniso, huwandu hwekutengesa hwegore rose hwema disks akaomeswa anotarisirwa kusvika zviuru makumi matatu nemazana matatu nemakumi mashanu ezviuru muna345, kanenge kaviri muna2004, uye huwandu hwekutengesa mbozhanhare muna1999 hunofungidzirwa kunge zvikamu mazana matanhatu emamiriyoni. Izvi zvinowedzera zvinotungamira mukuwedzera kwegore rino kwe2005% mukuburitswa kwemakiromita akakwira-maseru anoshanduka, achisvika mamirioni mazana matatu emamirimita na600. Yakakwira yakadai kudiwa inoda hunyanzvi uye hwakachipa-kugadzirisa kugadzira tekinoroji, uye laser kugadzira tekinoroji ndeimwe yacho. .

Laser ine matatu makuru mashandiro mukugadzira maitiro eanochinja wedunhu bhodhi: kugadzirisa uye kugadzira (kucheka nekucheka), slicing uye kuchera. Seye isiri-yekuonana machining chishandiso, laser inogona kushandiswa mune diki kwazvo kutarisa (100 ~ 500) μ m) Yakakwira kusimba mwenje simba (650MW / mm2) inoshandiswa kune izvo zvinhu. Simba rakakura rakadai rinogona kushandiswa pakucheka, kuchera, kumaka, kutenderera, kutara uye kumwe kugadzirisa. Iyo yekumhanyisa kumhanya uye mhando zvine hukama nemidziyo yezvinhu zvakagadziriswa uye hunhu hwemalasi zvinoshandiswa, senge wavelength, simba rehuwandu, simba repamusoro, kupisa kwehupamhi uye kuwanda. Kugadziriswa kweanoshanduka wedunhu bhodhi inoshandisa ultraviolet (UV) uye kure infrared (MOTI) lasers. Iyo yekutanga inowanzo shandisa excimer kana UV diode yakapomerwa solid-state (uv-dpss) lasers, nepo yekupedzisira inowanzo shandisa yakavharwa CO2 lasers div>

Vector scanning tekinoroji inoshandisa komputa kudzora girazi rakagadzirirwa kuyerera mita uye CAD / CAM software kugadzira kubaya nekuchera mifananidzo, uye inoshandisa telecentric lens system kuona kuti laser inopenya yakatwasuka pane yekushandira nzvimbo </ div>

Laser Kuchera kugadzira kune yakakwirira chaiyo uye yakafara kunyorera. Icho chishandiso chakanakira chekuumba inochinjika redunhu bhodhi. Kunyangwe CO2 laser kana DPSS laser, izvo zvinhu zvinogona kugadziriswa kuita chero chimiro mushure mekutarisa. Iyo inoburitsa yakatarwa laser danda pese pacho pairi nzvimbo yebasa nekuisa girazi pane iyo galvanometer, yozoitisa komputa yekuverenga kudzora (CNC) pane galvanometer nekushandisa vector scanning tekinoroji, uye inogadzira mifananidzo yekucheka nerubatsiro rweCAD / CAM software. Iyi “chishandiso chakapfava” inogona kudzora zviri nyore iyo laser munguva chaiyo kana dhizaini yashandurwa. Nekugadzirisa iyo shrinkage yechiedza uye akasiyana ekucheka maturusi, laser kugadzira inogona kunyatso kuburitsa dhizaini dhizaini, inova imwe yakakosha mukana.

Vector scanning inogona kutema substrates senge polyimide firimu, cheka dunhu rese kana kubvisa nzvimbo pane redunhu bhodhi, senge slot kana block. Mukuita kwekugadzirisa uye kugadzira, iro danda re laser rinogara rakabatidzwa kana girazi richiongorora iyo yese yekugadzirisa nzvimbo, iyo yakatarisana neiyo yekuchera maitiro. Munguva yekuchera, iyo laser inovhurwa chete mushure mekunge girazi rakagadziriswa pane yega nzvimbo yekuchera nzvimbo div>

chidimbu

“Kuchekerera” muchirangaridzo inzira yekubvisa imwe nhete yezvinhu kubva kune imwe ine laser. Izvi zvinonyanya kukodzera laser. Iyo imwecheteyo vector scanning tekinoroji inogona kushandiswa kubvisa dielectric uye kuburitsa iyo padhuidhi yepasi pazasi. Panguva ino, iyo chaiyo chaiyo yekugadziriswa kwemalaser zvakare inoratidza mabhenefiti makuru. Sezvo MOTO laser mwaranzi icharatidzirwa nemhangura foil, CO2 laser inowanzo shandiswa pano.

chibooreso

Kunyangwe dzimwe nzvimbo dzichiri kushandisa michina kuchera, kutsika kana plasma etching kugadzira micro kuburikidza nemakomba, laser kuchera ichiri inonyanyo shandiswa micro kuburikidza nemakomba kugadzira nzira yekushanduka wedunhu bhodhi, kunyanya nekuda kwayo kwakawanda kubereka, kusimba kuchinjika uye yakareba yakajairika mashandiro nguva .

Mechanical kuchera uye stamping inotora yakakwira-chaiyo yekuboora mabheti uye inofa, iyo inogona kugadzirwa pane inochinjika redunhu bhodhi ine dhayamita yeinosvika 250 μ M, asi izvi zvakakwirira-chaizvo zvigadzirwa zvinodhura zvakanyanya uye zvine hupenyu hupfupi hwebasa. Nekuda kweiyo yakakwira-kuwanda inochinja-chinja wedunhu bhodhi, inodiwa yekuzarura chiyero iri 250 μ M idiki, saka michina kuchera hakufarirwe.

Plasma etching inogona kushandiswa pa50 μ M gobvu polyimide firimu substrate ine saizi isingasviki 100 μ M, asi michina yekudyara uye mutengo wekuita wakanyanya kukwirira, uye mutengo wekuchengetedza kweplasma etching maitiro zvakare akakwirira, kunyanya mitengo inoenderana kune kumwe kurapwa kwemakemikari uye zvinoshandiswa. Uye zvakare, zvinotora nguva yakareba kwazvo kuti plasma etching iite inowirirana uye yakavimbika micro vias kana ichitanga maitiro matsva. Kubatsira kwemaitiro aya kwakanyanya kuvimbika. Zvinonzi muyero unokodzera we micro kuburikidza ne 98%. Naizvozvo, plasma etching ichine imwe musika mune zvekurapa uye avionics michina div>

Mukupesana, kunyepedzera kwema micro vias nelaser iri nyore uye yakaderera-mutengo maitiro. Iko kudyara kwemalaser zvishandiso kwakaderera kwazvo, uye laser chishandiso chisiri chekubata. Kusiyana nemishini yekuchera, pachave neinodhura chishandiso chinotsiva mutengo. Uye zvakare, yazvino yakasimbiswa CO2 uye uv-dpss lasers ndeyekuchengetedza mahara, ayo anogona kudzikamisa nguva yekuzorora uye nekuvandudza zvakanyanya kugadzirwa.

Maitiro ekugadzira micro vias pane inochinjika redunhu bhodhi yakafanana neayo pane akaomarara pcb, asi mamwe akakosha parameter emalaser anoda kuchinjwa nekuda kwekusiyana kweiyo substrate uye ukobvu. Yakavharwa CO2 uye uv-dpss lasers inogona kushandisa imwecheteyo vector scanning tekinoroji sekuumba kudhizaira zvakananga pane inochinja wedunhu bhodhi. Musiyano chete ndewekuti kuchera chikumbiro software kuchadzima iyo laser panguva yekuvheneka girazi kuongorora kubva kune imwe micro kuenda kune imwe. Iyo laser danda haizoshandurwe kudzimara yasvika kune imwe nzvimbo yekuchera. Kugadzira gomba rakatarisana nepamusoro peiyo inoshanduka wedunhu bhodhi substrate, iyo laser danda inofanira kupenya yakatwasuka pane wedunhu bhodhi substrate, iyo inogona kuwanikwa kuburikidza nekushandisa telecentric lens system pakati pegirazi rekuongorora uye substrate (Fig. 2 ) div>

Makomba akachera paKapton achishandisa UV laser

CO2 laser inogona zvakare kushandisa inoenderana mask mask tekinoroji yekuboora micro vias. Paunenge uchishandisa tekinoroji iyi, iyo yemhangura pamusoro inoshandiswa seichi chifukidzo, maburi anonamira pairi neyakajairika nzira yekudhinda, uye ipapo iyo CO2 laser danda rakavhenekerwa pamaburi eiyo foil foil kubvisa izvo zvakafumurwa dielectric zvinhu.

Micro vias inogona zvakare kugadzirwa nekushandisa excimer laser kuburikidza nenzira yekuratidzira mask. Iyi tekinoroji inoda mepu yemufananidzo weiyo micro kuburikidza kana iyo yose micro kuburikidza neakarongedzwa kune iyo substrate, uye ipapo iyo excimer laser danda inojekesa iyo masiki yekumaka iyo mask chifananidzo kune iyo substrate pamusoro, kuitira kubaya gomba. Hunhu hwe excimer laser kuchera wakanaka kwazvo. Kukanganisa kwayo kwakaderera kumhanya uye kudhura.

Laser kusarudzwa kunyangwe iyo laser mhando yekugadzirisa inochinjika redunhu bhodhi yakafanana neiya yekugadzirisa yakaoma pcb, mutsauko wezvinhu uye ukobvu zvinokanganisa zvakanyanya maitiro ekugadzirisa uye nekumhanyisa. Dzimwe nguva excimer laser uye inopfuura inofara gasi (tii) CO2 laser inogona kushandiswa, asi idzi nzira mbiri dzinononoka kumhanya uye yakakwira yekugadzirisa mutengo, iyo inogumira kuvandudzwa kwekugadzirwa. Mukuenzanisa, CO2 uye uv-dpss lasers anoshandiswa zvakanyanya, nekukurumidza uye kwakaderera mutengo, saka iwo anonyanya kushandiswa mukugadzira nekugadzirisa kwema micro vias eanochinja wedunhu mabhodhi.

Yakasiyana negasi kuyerera CO2 laser, yakavharwa CO2 laser （http://www.auto-alt.cn block Iyo block block yekuburitsa tekinoroji inogamuchirwa kugadzirisa iyo laser gasi musanganiswa kune iyo laser mhango yakatsanangurwa nemaviri emakona emakona e electrode mahwendefa. Iyo laser mhango yakavharidzirwa mukati mehupenyu hwese hwebasa (kazhinji anenge makore maviri kusvika matatu). Iyo yakavharwa laser mhango ine compact dhizaini uye haidi mhepo yekuchinjana. Musoro we laser unogona kushanda uchienderera kweanopfuura maawa 2 pasina kugadzirisa. Mukana wakakura kwazvo wekusimbisa dhizaini ndeyekuti unogona kuburitsa pulses inokurumidza. Semuenzaniso, iyo block yekuburitsa laser inogona kuburitsa yakakwira-frequency (3kHz) pulses ine simba yepamusoro ye25000KW. Iine yakakwira frequency uye yakakwira yepamusoro simba, inokurumidza machining inogona kuitwa pasina chero kupisa kwekudzikisira div>

Uv-dpss laser ndeye yakasimba-yenyika chishandiso icho chinoramba chichiyamwa neodymium vanadate (Nd: YVO4) kristall tsvimbo ine laser diode array. Inogadzira kupomba kwakaburitswa neacousto-optic Q-switch, uye inoshandisa yechitatu harmonic kristaro jenareta kushandura kubuda kweNd: YVO4 laser kubva 1064nm & nbsp; Iyo IR yekutanga wavelength yakaderedzwa kusvika 355 nm UV wavelength. Kazhinji 355nm </ div>

Ivhareji kuburitsa simba reUv-dpss laser pa20kHz yezita remapse kudzokorora chiyero chinopfuura 3W div>

Uv-dpss laser

Ose dielectric nemhangura zvinogona kupinza zviri nyore UV-dpss laser neinobuda wavelength ye355nm. Uv-dpss laser ine diki mwenje nzvimbo uye yakadzika simba rekuburitsa pane CO2 laser. Mukuita kwe dielectric kugadzirisa, uv-dpss laser inowanzo shandiswa kudiki diki (isingasviki 50%) μ m) Naizvozvo, iyo dhayamita isingasviki makumi mashanu inofanira kugadziriswa pane substrate yeakakwira-density inoshanduka wedunhu bhodhi μ M micro kuburikidza , uchishandisa UV laser yakanaka kwazvo. Ikozvino kune yakakwira-simba uv-dpss laser, iyo inogona kuwedzera kugadzirisa uye kuchera kumhanya kweiyo uv-dpss laser div>

Kubatsira kweiyo uv-dpss laser ndeyekuti kana iyo yakasimba-simba UV mafoto achipenya pane akawanda asiri esimbi pamusoro pezvikamu, anogona kutyora zvakananga chinongedzo chemamorekuru, kutsvedza iyo yekucheka kumucheto ne “kutonhora” lithography maitiro, uye kudzikisira degree re kupisa kupisa uye kupisa. Naizvozvo, UV micro yekucheka yakakodzera kune yakanyanya kudiwa nguva apo post-kurapwa isingagone kana zvisina basa div>

CO2 Laser (kushandisa michina nzira)

Yakavharwa CO2 laser inogona kuburitsa hurefu hwe10.6 μ M kana 9.4 μ M MOTI laser laser, kunyange ese marefu wavelengs ari nyore kutorwa ne dielectric senge polyimide firimu substrate, iyo tsvagiridzo inoratidza kuti 9.4 μ Mhedzisiro yeM Mvelength inogadzirisa iyi mhando yezvinhu zvirinani kwazvo. Dielectric 9.4 μ Iyo coefficient yekubatira yeM M wavelength yakakwira, iri nani pane 10.6 yekuchera kana yekucheka zvinhu μ M wavelength nekukurumidza. pfumbamwe pfungwa ina μ M Laser kwete chete ane pachena zvakwakanakira mukuchera uye kucheka, asi zvakare ine yakatanhamara slicing maturo. Naizvozvo, iko kushandiswa kweiyo ipfupi wavelength laser inogona kuvandudza kugadzirwa uye mhando.

Kazhinji kutaura, fir wavelength inobatwa nyore ne dielectric, asi inozoratidzwa kumashure nemhangura. Naizvozvo, mazhinji CO2 lasers anoshandiswa kugadzira dielectric kugadzira, kuumba, kucheka uye kudhiraina dielectric substrate uye laminate. Nekuti iro rinoburitsa simba re CO2 laser rakakwirira kupfuura iro reDPSS laser, CO2 laser inoshandiswa kugadzirisa dielectric mune dzakawanda kesi. CO2 laser uye uv-dpss laser inowanzo shandiswa pamwechete. Semuenzaniso, kana uchichera micro vias, tanga wabvisa mhangura yemhangura neDPSS laser, uye wozokurumidza kuboora maburi mune dielectric layer ne CO2 laser kudzamara iyo inotevera mhangura yakapfeka rukoko yaonekwa, wobva wadzokorora maitiro.

Nekuti iyo wavelength ye UV laser pachayo ipfupi, iyo nzvimbo yechiedza inoburitswa ne UV laser yakanaka kupfuura iyo ye CO2 laser, asi mune kumwe kunyorera, iyo hombe-dhayamita mwenje mwenje unoburitswa neCO2 laser inobatsira kupfuura uv-dpss laser. Semuenzaniso, cheka hombe nzvimbo zvigadzirwa senge grooves uye mabhureki kana kuchera maburi makuru (dhayamita yakakura kupfuura 50) μ m) Zvinotora nguva shoma kugadzirisa ne CO2 laser. Kazhinji kutaura, iyo aperture reshiyo iri 50 μ Kana m iri yakakura, CO2 laser kugadzira yakanyanyisa, uye iyo aperture iri pasi pe50 μ M, mhedzisiro ye uv-dpss laser iri nani.